Skip to main content

Backscattering Coefficient

  • Chapter
  • First Online:
  • 565 Accesses

Part of the book series: Springer Tracts in Modern Physics ((STMP,volume 271))

Abstract

The backscattered electron emission coefficient is defined as the fraction of electrons of the primary beam emerging from the surface of an electron-irradiated target. Secondary electrons, generated in the solid by a cascade process of extraction of the atomic electrons, are not included in the definition of the backscattering coefficient.

This is a preview of subscription content, log in via an institution.

Buying options

Chapter
USD   29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD   119.00
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD   159.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Learn about institutional subscriptions

References

  1. M. Dapor Phys. Rev. B 46, 618 (1992)

    Google Scholar 

  2. M. Dapor, Electron-Beam Interactions with Solids: Application of the Monte Carlo Method to Electron Scattering Problems (Springer, Berlin, 2003)

    Book  Google Scholar 

  3. R. Cimino, I.R. Collins, M.A. Furman, M. Pivi, F. Ruggiero, G. Rumolo, F. Zimmermann, Phys. Rev. Lett. 93, 014801 (2004)

    Article  ADS  Google Scholar 

  4. M.A. Furman, V.H. Chaplin, Phys. Rev. Spec. Topics - Accel. Beams 9, 034403 (2006)

    Google Scholar 

  5. M. Vicanek, H.M. Urbassek, Phys. Rev. B 44, 7234 (1991)

    Article  ADS  Google Scholar 

  6. M. Dapor, J. Appl. Phys. 79, 8406 (1996)

    Article  ADS  Google Scholar 

  7. J.C. Ashley, J. Electron Spectrosc. Relat. Phenom. 46, 199 (1988)

    Article  Google Scholar 

  8. R.H. Ritchie, Phys. Rev. 106, 874 (1957)

    Article  ADS  MathSciNet  Google Scholar 

  9. N.F. Mott, Proc. R. Soc. Lond. Ser. 124, 425 (1929)

    ADS  Google Scholar 

  10. H.E. Bishop, in Proceedings of 4ème Congrès International d’Optique des Rayons X et de Microanalyse (1967), pp. 153–158

    Google Scholar 

  11. H.J. Hunger, L.G. Küchler, Phys. Status Solidi A 56, K45 (1979)

    Article  ADS  Google Scholar 

  12. S. Tanuma, C.J. Powell, D.R. Penn, Surf. Interface Anal. 37, 978 (2005)

    Article  Google Scholar 

  13. D.C. Joy (2008), http://web.utk.edu/~srcutk/htm/interact.htm

  14. I.M. Bronstein, B.S. Fraiman, Vtorichnaya Elektronnaya Emissiya (Nauka, Moskva, 1969)

    Google Scholar 

  15. L. Reimer, C. Tolkamp, Scanning 3, 35 (1980)

    Article  Google Scholar 

  16. T. Koshikawa, R. Shimizu, J. Phys. D. Appl. Phys. 6, 1369 (1973)

    Article  ADS  Google Scholar 

  17. R. Böngeler, U. Golla, M. Kussens, R. Reimer, B. Schendler, R. Senkel, M. Spranck, Scanning 15, 1 (1993)

    Article  Google Scholar 

  18. J. Ch, Kuhr and H.J. Fitting, Phys. Status Solidi A 172, 433 (1999)

    Google Scholar 

  19. M.M. El Gomati, C.G. Walker, A.M.D. Assa’d, M. Zadra\(\check{\text{z}}\)il, Scanning 30, 2 (2008)

    Google Scholar 

  20. M. Dapor, J. Appl. Phys. 95, 718 (2004)

    Article  ADS  Google Scholar 

  21. M. Dapor, Surf. Interface Anal. 38, 1198 (2006)

    Article  Google Scholar 

  22. M. Dapor, Surf. Interface Anal. 40, 714 (2008)

    Article  Google Scholar 

  23. M. Dapor, N. Bazzanella, L. Toniutti, A. Miotello, S. Gialanella, Nucl. Instrum. Methods Phys. Res. B 269, 1672 (2011)

    Article  ADS  Google Scholar 

  24. M. Dapor, N. Bazzanella, L. Toniutti, A. Miotello, M. Crivellari, S. Gialanella, Surf. Interface Anal. 45, 677 (2013)

    Article  Google Scholar 

  25. K. Kanaya, S. Okayama, J. Phys. D. Appl. Phys. 5, 43 (1972)

    Article  ADS  Google Scholar 

  26. M. Dapor, J. Electron Spectrosc. Relat. Phenom. 151, 182 (2006)

    Article  Google Scholar 

  27. G.C. Aers, J. Appl. Phys. 76, 1622 (1994)

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Maurizio Dapor .

Rights and permissions

Reprints and permissions

Copyright information

© 2020 Springer Nature Switzerland AG

About this chapter

Check for updates. Verify currency and authenticity via CrossMark

Cite this chapter

Dapor, M. (2020). Backscattering Coefficient. In: Transport of Energetic Electrons in Solids. Springer Tracts in Modern Physics, vol 271. Springer, Cham. https://doi.org/10.1007/978-3-030-43264-5_8

Download citation

Publish with us

Policies and ethics