Abstract
Before describing the use of the Monte Carlo method to simulate the processes of electron-matter interaction, a few elementary concepts and definitions about electron beams impinging on solid targets and thin films will be provided.
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Notes
- 1.
In order to simplify the notation, we will use the symbol r instead of \(\eta \) in this chapter only to indicate the backscattering coefficient.
- 2.
In this chapter we will not consider the generation of secondary electrons.
- 3.
Note that the simplest function satisfying these conditions is the following:
$$\begin{aligned} \xi (s)\,\propto \frac{s}{R-s}\,, \end{aligned}$$where the constant of proportionality depends on the nature of the target.
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Dapor, M. (2020). Electron Beam Interactions with Solid Targets and Thin Films. Basic Aspects. In: Transport of Energetic Electrons in Solids. Springer Tracts in Modern Physics, vol 271. Springer, Cham. https://doi.org/10.1007/978-3-030-43264-5_7
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DOI: https://doi.org/10.1007/978-3-030-43264-5_7
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