Monte Carlo Strategies
- 191 Downloads
Monte Carlo is one of the most powerful theoretical methods for evaluating the physical quantities related to the interaction of electrons with a solid target. A Monte Carlo simulation can be considered as an idealized experiment. It is based on several fundamental ingredients. It is necessary to have a good knowledge of them—in particular of the energy loss and angular deflection phenomena—to obtain a good simulation. All the cross-sections and mean free paths have to be previously accurately calculated: they are then used in the Monte Carlo code in order to obtain the macroscopic characteristics of the interaction processes by simulating a large number of single particle trajectories and then averaging them. Due to the recent evolution in computer calculation capability, we are now able to obtain statistically significant results in very short calculation times.
- 10.L. Calliari, M. Dapor, G. Garberoglio, S. Fanchenko Surf, Interface Anal. 46, 340 (2014)Google Scholar
- 13.P. Kazemian, Progress Towards Quantitive Dopant Profiling with the Scanning Electron Microscope (Doctorate Dissertation, University of Cambridge, 2006)Google Scholar
- 21.H. Jin, H. Yoshikawa, H. Iwai, S. Tanuma, S. Tougaard, e-J. Surf. Sci. Nanotech. 7, 199 (2009)Google Scholar
- 24.B. Da, S.F. Mao, Y. Sun, and Z.J. Ding, e-J. Surf. Sci. Nanotechnol. 10, 441 (2012)Google Scholar
- 26.F. Salvat-Pujol, Secondary-Electron Emission from Solids: Coincidence Experiments and Dielectric Formalism (Doctorate Dissertation, Technischen Universität Wien, 2012)Google Scholar