Part of the Springer Tracts in Modern Physics book series (STMP, volume 271)


In this chapter we will discuss some important applications of the Monte Carlo method. We will describe, in particular, (1) the line-scan calculations of resist materials with given geometrical cross-sections deposited on silicon substrates; (2) the energy selective SEM for image contrast in silicon p-n junctions; (3) the density of energy radially deposited by secondary electrons around the tracks of ions through polymers and bio-molecular systems.


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© Springer Nature Switzerland AG 2020

Authors and Affiliations

  1. 1.European Centre for Theoretical Studies in Nuclear Physics and Related AreasTrentoItaly

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