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Fabrication of Polymeric Micro Structures Using Improved Hot Embossing Technique

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Advances in Engineering Research and Application (ICERA 2019)

Part of the book series: Lecture Notes in Networks and Systems ((LNNS,volume 104))

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Abstract

The paper proposes an improved hot embossing process of polymeric PMMA material using low-friction silicon molds, forcing and water-cooling subsystems integrated additionally, aiming to reduce total time of embossing cycle and extend lifetime of a master mold. The result of embossing experiments shows that the profile of PMMA micro structures (with a minimum feature size of 2 µm) using improved embossing process is sharper, higher aspect ratio and more uniformed than the counterparts, which use the traditional process without vacuum.

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Acknowledgment

This research is funded by Vietnam National Foundation for Science and Technology Development (NAFOSTED) under Grant number ‘‘107.01-2019.05’’.

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Authors and Affiliations

  1. School of Mechanical Engineering, Hanoi University of Science and Technology (HUST), 1-Daicoviet, Hanoi, Vietnam

    Pham Hong Phuc

  2. Griffith University, Gold Coast, QLD, Australia

    Dao Viet Dzung

Authors
  1. Pham Hong Phuc
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  2. Dao Viet Dzung
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Corresponding author

Correspondence to Pham Hong Phuc .

Editor information

Editors and Affiliations

  1. Department of Computer Science and Automation, TU Ilmenau, Ilmenau, Thüringen, Germany

    Kai-Uwe Sattler

  2. Faculty of Electronic Engineering, Thai Nguyen University of Technology, Thai Nguyen, Vietnam

    Duy Cuong Nguyen

  3. Faculty of Mechanical Engineering, Thai Nguyen University of Technology, Thai Nguyen, Vietnam

    Ngoc Pi Vu

  4. Hanoi University of Science and Technology, Hanoi, Vietnam

    Banh Tien Long

  5. Institute for Automation and Systems Engineering, TU Ilmenau, Ilmenau, Thüringen, Germany

    Horst Puta

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Phuc, P.H., Dzung, D.V. (2020). Fabrication of Polymeric Micro Structures Using Improved Hot Embossing Technique. In: Sattler, KU., Nguyen, D., Vu, N., Tien Long, B., Puta, H. (eds) Advances in Engineering Research and Application. ICERA 2019. Lecture Notes in Networks and Systems, vol 104. Springer, Cham. https://doi.org/10.1007/978-3-030-37497-6_40

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