Abstract
Halide vapor phase epitaxy of metastable α- and ε-Ga2O3 is reviewed. The both polymorphs were grown using GaCl and O2 as precursors. Phase-pure corundum α-Ga2O3 was heteroepitaxially grown on (0001) sapphire at temperatures of approximately 550 °C or lower. The n-type electrical conductivity was controlled by Ge doping using GeCl4 as the dopant source, and very low resistivity of 8.6 mΩ cm was achieved. Epitaxial lateral overgrowth was shown to be effective in improving the crystal quality, and the dislocation density was reduced from 1010 cm−2 to less than 5 × 106 cm−2 in the laterally grown wing region. Morphology of α-Ga2O3 islands was controlled such that inclined facets well develop, and dislocation density above mask openings remarkably decreased due to dislocation bending caused by the inclined facets. Orthorhombic ε-Ga2O3 was grown on (0001) GaN and (0001) AlN using virtually the same growth recipe as that used for α-Ga2O3 . Fundamental material properties of ε-Ga2O3, such as the optical bandgap energy, thermal stability , and thermal expansion coefficient, were investigated using the epitaxial film.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
R. Roy, V.G. Hill, E.F. Osborn, J. Am. Chem. Soc. 74, 719 (1952)
H. Aida, K. Nishiguchi, H. Takeda, N. Aota, K. Sunakawa, Y. Yaguchi, Jpn. J. Appl. Phys. 47, 8506 (2008)
E.G. Víllora, K. Shimamura, Y. Yoshikawa, K. Aoki, N. Ichinose, J. Cryst. Growth 270, 420 (2004)
Z. Galazka, K. Irmscher, R. Uecker, R. Bertram, M. Pietsch, A. Kwasniewski, M. Naumann, T. Schulz, R. Schewski, D. Klimm, M. Bickermann, J. Cryst. Growth 404, 184 (2014)
K. Sasaki, A. Kuramata, T. Masui, E.G. Víllora, K. Shimamura, S. Yamakoshi, Appl. Phys. Express 5, 035502 (2012)
M. Higashiwaki, K. Sasaki, A. Kuramata, T. Masui, S. Yamakoshi, Appl. Phys. Lett. 100, 013504 (2012)
M. Higashiwaki, K. Sasaki, T. Kamimura, M.H. Wong, D. Krishnamurthy, A. Kuramata, T. Masui, S. Yamakoshi, Appl. Phys. Lett. 103, 123511 (2013)
Y. Oshima, E.G. Villora, K. Shimamura, Appl. Phys. Express 8, 055501 (2015)
Y. Oshima, E.G. Villora, Y. Matsushita, S. Yamamoto, K. Shimamura, J. Appl. Phys. 118, 085301 (2015)
Y. Oshima, E.G. Villora, K. Shimamura, J. Cryst. Growth 410, 53 (2015)
D. Shinohara, S. Fujita, Jpn. J. Appl. Phys. 47, 7311 (2008)
S. Fujita, K. Kaneko, J. Cryst. Growth 401, 588 (2014)
K. Kaneko, S. Fujita, T. Hitora, Jpn. J. Appl. Phys. 57, 02CB18 (2018)
M. Oda, R. Tokuda, H. Kambara, T. Tanikawa, T. Sasaki, T. Hitora, Appl. Phys. Express 9, 021101 (2016)
T. Kawaharamura, G.T. Dang, M. Furuta, Jpn. J. Appl. Phys. 51, 040207 (2012)
K. Akaiwa, S. Fujita, Jpn. J. Appl. Phys. 51, 070203 (2012)
K. Akaiwa, K. Kaneko, K. Ichino, S. Fujita, Jpn. J. Appl. Phys. 55, 1202BA (2016)
Y. Oshima, K. Kawara, T. Shinohe, T. Hitora, M. Kasu, S. Fujita, APL mater. 7, 022503 (2019)
L.J. Eckert, R.C. Bradt, J. Amer. Cer. Soc. 56, 229 (1973)
W.M. Yim, R.J. Paff, J. Appl. Phys. 45, 1456 (1974)
Y. Oshima, K. Kawara, M. Kasu, T. Shinohe, T. Hitora, Ge Doping of α-Ga2O3 by Halide Vapor Phase Epitaxy, in Paper Presented at 60th Electronic Materials Conference (University of California, Santa Barbara, June 2018), pp. 27–29
A. Usui, H. Sunakawa, A. Sakai, A.A. Yamaguchi, Jpn. J. Appl. Phys. 36, L899 (1997)
B.D. Joyce, J.A. Baldrey, Nature 195, 486 (1962)
F.W. Tausch Jr., A.G. Lapierre III, J. Electrochem. Soc. 112, 706 (1965)
T. Nishinaga, T. Nakano, S. Zhang, Jpn. J. Appl. Phys. 27, L964 (1988)
Y. Oshima, T. Eri, M. Shibata, H. Sunakawa, K. Kobayashi, T. Ichihashi, A. Usui, Jpn. J. Appl. Phys. 42, L1 (2003)
K. Motoki, T. Okahisa, N. Matsumoto, M. Matsushima, H. Kimura, H. Kasai, K. Takemoto, K. Uematsu, T. Hirano, M. Nakayama, S. Nakahata, M. Ueno, D. Hara, Y. Kumagai, A. Koukitu, H. Seki, Jpn. J. Appl. Phys. 40, L140 (2001)
A. Sakai, H. Sunakawa, A. Usui, Appl. Phys. Lett. 73, 481 (1998)
P. Fini, C. Thompson, G.B. Stephenson, J.A. Eastman, M.V. Ramana Murty, O. Auciello, L. Zhao, S.P. Denbaars, J.S. Speck, Appl. Phys. Lett. 76, 3893 (2000)
H.Y. Playford, A.C. Hannon, E.R. Barney, R.I. Walton, Chem. Eur. J. 19, 2803 (2013)
I. Cora, F. Mezzadri, F. Boschi, M. Bosi, M. Čaplovičová, G. Calestani, I. Dódony, B. Pécz, R. Fornari, Cryst. Eng. Comm 19, 1509 (2017)
H. Nishinaka, H. Komai, D. Tahara, Y. Arata, M. Yoshimoto, Jpn. J. Appl. Phys. 57, 115601 (2018)
M.B. Maccioni, V. Fiorentini, Appl. Phys. Express 9, 041102 (2016)
F. Mezzadri, G. Calestani, F. Boschi, D. Delmonte, M. Bosi, R. Fornari, Inorg. Chem. 55, 12079 (2016)
F. Boschi, M. Bosi, T. Berzina, E. Buffagni, C. Ferrari, R. Fornari, J. Cryst. Growth 443, 25 (2016)
H. Nishinaka, D. Tahara, M. Yoshimoto, Jpn. J. Appl. Phys. 55, 1202BC (2016)
Acknowledgements
Part of this work is based on results obtained from a project commissioned by the New Energy and Industrial Technology Development Organization (NEDO). This work was also partly supported by a Grant-in-Aid for Scientific Research (C) Nos. 25420307 and 17K05047 from the Japan Society for the Promotion of Science (JSPS). The author would like to acknowledge K. Kawara, T. Shinohe, T. Hitora, Prof. M. Kasu, and Prof. S. Fujita for their contributions to the NEDO project. The author would also like to thank Drs. E.G. Villora, Y. Matsushita, S. Yamamoto, and K. Shimamura for their support in the JSPS projects.
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2020 Springer Nature Switzerland AG
About this chapter
Cite this chapter
Oshima, Y. (2020). Halide Vapor Phase Epitaxy 2. In: Higashiwaki, M., Fujita, S. (eds) Gallium Oxide. Springer Series in Materials Science, vol 293. Springer, Cham. https://doi.org/10.1007/978-3-030-37153-1_11
Download citation
DOI: https://doi.org/10.1007/978-3-030-37153-1_11
Published:
Publisher Name: Springer, Cham
Print ISBN: 978-3-030-37152-4
Online ISBN: 978-3-030-37153-1
eBook Packages: Chemistry and Materials ScienceChemistry and Material Science (R0)