Skip to main content

Introduction

  • Chapter
  • First Online:
Gallium Oxide

Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 293))

Abstract

This introductory chapter provides current and comprehensive information about gallium oxide, covering crystal structures, basic physical properties, bulk melt growth and thin-film epitaxial growth methods, and representative electrical and optical devices.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 149.00
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 199.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 199.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

References

  1. J.Y. Tsao, S. Chowdhury, M.A. Hollis, D. Jena, N.M. Johnson, K.A. Jones, R.J. Kaplar, S. Rajan, C.G. Van de Walle, E. Bellotti, C.L. Chua, R. Collazo, M.E. Coltrin, J.A. Cooper, K.R. Evans, S. Graham, T.A. Grotjohn, E.R. Heller, M. Higashiwaki, M.S. Islam, P.W. Juodawlkis, M.A. Khan, A.D. Koehler, J.H. Leach, U.K. Mishra, R.J. Nemanich, R.C.N. Pilawa-Podgurski, J.B. Shealy, Z. Sitar, M.J. Tadjer, A.F. Witulski, M. Wraback, J.A. Simmons, Adv. Electron. Mater. 4, 1600501 (2018)

    Article  CAS  Google Scholar 

  2. T. Onuma, S. Saito, K. Sasaki, T. Masui, T. Yamaguchi, T. Honda, M. Higashiwaki, Jpn. J. Appl. Phys. 54, 112601 (2015)

    Article  CAS  Google Scholar 

  3. M. Higashiwaki, G.H. Jessen, Appl. Phys. Lett. 112, 060401 (2018)

    Article  CAS  Google Scholar 

  4. R. Roy, V.G. Hill, E.F. Osborn, J. Am. Chem. Soc. 74, 719 (1952)

    Article  CAS  Google Scholar 

  5. H.H. Tippins, Phys. Rev. A 140, A316 (1965)

    Article  Google Scholar 

  6. M. Higashiwaki, K. Sasaki, A. Kuramata, T. Masui, S. Yamakoshi, Appl. Phys. Lett. 100, 013504 (2012)

    Article  CAS  Google Scholar 

  7. S. Geller, J. Chem. Phys. 33, 676 (1960)

    Article  CAS  Google Scholar 

  8. D. Shinohara, S. Fujita, Jpn. J. Appl. Phys. 47, 7311 (2008)

    Article  CAS  Google Scholar 

  9. M. Kneiß, A. Hassa, D. Splith, C. Sturm, H. von Wenckstern, T. Schultz, N. Koch, M. Lorenz, M. Grundmann, APL Mater. 7, 022516 (2019)

    Article  CAS  Google Scholar 

  10. M. Orita, H. Ohta, M. Hirano, H. Hosono, Appl. Phys. Lett. 77, 4166 (2000)

    Article  CAS  Google Scholar 

  11. H. He, R. Orlando, M.A. Blanco, R. Pandey, E. Amzallag, I. Baraille, M. Rérat, Phys. Rev. B 74, 195123 (2006)

    Article  CAS  Google Scholar 

  12. K. Goto, K. Konishi, H. Murakami, Y. Kumagai, B. Monemar, M. Higashiwaki, A. Kuramata, S. Yamakoshi, Thin Solid Films 666, 182 (2018)

    Article  CAS  Google Scholar 

  13. T. Onuma, S. Saito, K. Sasaki, K. Goto, T. Masui, T. Yamaguchi, T. Honda, A. Kuramata, M. Higashiwaki, Appl. Phys. Lett. 108, 101904 (2016)

    Article  CAS  Google Scholar 

  14. N. Ma, N. Tanen, A. Verma, Z. Guo, T. Luo, H. Xing, D. Jena, Appl. Phys. Lett. 109, 212101 (2016)

    Article  CAS  Google Scholar 

  15. J.B. Varley, J.R. Weber, A. Janotti, C.G. Van de Walle, Appl. Phys. Lett. 97, 142106 (2010)

    Article  CAS  Google Scholar 

  16. A. Mock, R. Korlacki, C. Briley, V. Darakchieva, B. Monemar, Y. Kumagai, K. Goto, M. Higashiwaki, M. Schubert, Phys. Rev. B 96, 245205 (2017)

    Article  Google Scholar 

  17. Y. Zhang, A. Neal, Z. Xia, C. Joishi, J.M. Johnson, Y. Zheng, S. Bajaj, M. Brenner, D. Dorsey, K. Chabak, G. Jessen, J. Hwang, S. Mou, J.P. Heremans, S. Rajan, Appl. Phys. Lett. 112, 173502 (2018)

    Article  CAS  Google Scholar 

  18. K. Ghosh, U. Singisetti, J. Appl. Phys. 122, 035702 (2017)

    Article  CAS  Google Scholar 

  19. J.L. Lyons, Semicond. Sci. Technol. 33, 05LT02 (2018)

    Google Scholar 

  20. H. Peelaers, J.L. Lyons, J.B. Varley, C.G. Van de Walle, APL Mater. 7, 022519 (2019)

    Article  CAS  Google Scholar 

  21. T. Gake, Y. Kumagai, F. Oba, Phys. Rev. Mater. 3, 044603 (2019)

    Article  CAS  Google Scholar 

  22. J.B. Varley, A. Janotti, C. Franchini, C.G. Van de Walle, Phys. Rev. B 85, 081109(R) (2012)

    Article  CAS  Google Scholar 

  23. H. Peelaers, C.G. Van de Walle, Phys. Status Solidi B 252, 828 (2015)

    Article  CAS  Google Scholar 

  24. M. Handwerg, R. Mitdank, Z. Galazka, S.F. Fischer, Semicond. Sci. Technol. 30, 024006 (2015)

    Article  CAS  Google Scholar 

  25. M.D. Santia, N. Tandon, J.D. Albrecht, Appl. Phys. Lett. 107, 041907 (2015)

    Article  CAS  Google Scholar 

  26. Z. Guo, A. Verma, X. Wu, F. Sun, A. Hickman, T. Masui, A. Kuramata, M. Higashiwaki, D. Jena, T. Luo, Appl. Phys. Lett. 106, 111909 (2015)

    Article  CAS  Google Scholar 

  27. C.-H. Lin, N. Hatta, K. Konishi, S. Watanabe, A. Kuramata, K. Yagi, M. Higashiwaki, Appl. Phys. Lett. 114, 032103 (2019)

    Article  CAS  Google Scholar 

  28. A.B. Chase, J. Am. Ceram. Soc. 47, 470 (1964)

    Article  CAS  Google Scholar 

  29. E.G. Víllora, K. Shimamura, Y. Yoshikawa, K. Aoki, N. Ichinose, J. Cryst. Growth 270, 420 (2004)

    Article  CAS  Google Scholar 

  30. S. Ohira, M. Yoshioka, T. Sugawara, K. Nakajima, T. Shishido, Thin Solid Films 496, 53 (2006)

    Article  CAS  Google Scholar 

  31. A. Kuramata, K. Koshi, S. Watanabe, Y. Yamaoka, T. Masui, S. Yamakoshi, Jpn. J. Appl. Phys. 55, 1202A2 (2016)

    Google Scholar 

  32. Y. Tomm, P. Reiche, D. Klimm, T. Fukuda, J. Cryst. Growth 220, 510 (2000)

    Article  CAS  Google Scholar 

  33. Z. Galazka, R. Uecker, D. Klimm, K. Irmscher, M. Naumann, M. Pietsch, A. Kwasniewski, R. Bertram, S. Ganschow, M. Bickermann, ECS J. Solid State Sci. Technol. 6, Q3007 (2017)

    Article  CAS  Google Scholar 

  34. H. Aida, K. Nishiguchi, H. Takeda, N. Aota, K. Sunakawa, Y. Yaguchi, Jpn. J. Appl. Phys. 47, 8506 (2008)

    Article  CAS  Google Scholar 

  35. K. Hoshikawa, E. Ohba, T. Kobayashi, J. Yanagisawa, C. Miyagawa, Y. Nakamura, J. Cryst. Growth 447, 36 (2016)

    Article  CAS  Google Scholar 

  36. M.M. Muhammed, M. Peres, Y. Yamashita, Y. Morishima, S. Sato, N. Franco, K. Lorenz, A. Kuramata, I.S. Roqan, Appl. Phys. Lett. 105, 042112 (2014)

    Article  CAS  Google Scholar 

  37. T. Oshima, T. Okuno, S. Fujita, Jpn. J. Appl. Phys. 46, 7217 (2007)

    Article  CAS  Google Scholar 

  38. K. Sasaki, A. Kuramata, T. Masui, E.G. Víllora, K. Shimamura, S. Yamakoshi, Appl. Phys. Express 5, 035502 (2012)

    Article  CAS  Google Scholar 

  39. S.W. Kaun, F. Wu, J.S. Speck, J. Vac. Sci. Technol., A 33, 041508 (2015)

    Google Scholar 

  40. P. Vogt, O. Bierwagen, Appl. Phys. Lett. 108, 072101 (2016)

    Article  CAS  Google Scholar 

  41. H. Murakami, K. Nomura, K. Goto, K. Sasaki, K. Kawara, Q.T. Thieu, R. Togashi, Y. Kumagai, M. Higashiwaki, A. Kuramata, S. Yamakoshi, B. Monemar, A. Koukitu, Appl. Phys. Express 8, 015503 (2015)

    Article  CAS  Google Scholar 

  42. Y. Oshima, E.G. Víllora, K. Shimamura, Appl. Phys. Express 8, 055501 (2015)

    Article  CAS  Google Scholar 

  43. G. Wagner, M. Baldini, D. Gogova, M. Schmidbauer, R. Schewski, M. Albrecht, Z. Galazka, D. Klimm, R. Fornari, Phys. Status Solidi A 211, 27 (2014)

    Article  CAS  Google Scholar 

  44. M.J. Tadjer, M.A. Mastro, N.A. Mahadik, M. Currie, V.D. Wheeler, J.A. Freitas, J.D. Greenlee, J.K. Hite, K.D. Hobart, C.R. Eddy, F.J. Kub, J. Electron. Mater. 45, 2031 (2016)

    Article  CAS  Google Scholar 

  45. R. Schmidt-Grund, C. Kranert, T. Böntgen, H. von Wenckstern, H. Krauß, M. Grundmann, J. Appl. Phys. 116, 053510 (2014)

    Google Scholar 

  46. F. Zhang, K. Saito, T. Tanaka, M. Nishio, M. Arita, Q. Guo, Appl. Phys. Lett. 105, 162107 (2014)

    Article  CAS  Google Scholar 

  47. R. Wakabayashi, T. Oshima, M. Hattori, K. Sasaki, T. Masui, A. Kuramata, S. Yamakoshi, K. Yoshimatsu, A. Ohtomo, J. Cryst. Growth 424, 77 (2015)

    Article  CAS  Google Scholar 

  48. K.D. Leedy, K.D. Chabak, V. Vasilyev, D.C. Look, K. Mahalingam, J.L. Brown, A.J. Green, C.T. Bowers, A. Crespo, D.B. Thomson, G.H. Jessen, APL Mater. 6, 101102 (2018)

    Article  CAS  Google Scholar 

  49. T. Kawaharamura, G.T. Dang, M. Furuta, Jpn. J. Appl. Phys. 51, 040207 (2012)

    Google Scholar 

  50. B.J. Baliga, J. Appl. Phys. 53, 1759 (1982)

    Article  CAS  Google Scholar 

  51. B.J. Baliga, IEEE Electron Device Lett. 10, 455 (1989)

    Article  Google Scholar 

  52. K. Konishi, K. Goto, H. Murakami, Y. Kumagai, A. Kuramata, S. Yamakoshi, M. Higashiwaki, Appl. Phys. Lett. 110, 103506 (2017)

    Article  CAS  Google Scholar 

  53. W. Li, Z. Hu, K. Nomoto, R. Jinno, Z. Zhang, T.Q. Tu, K. Sasaki, A. Kuramata, D. Jena, H.G. Xing, in Technical Digest of the IEEE International Electron Devices Meeting (2018)

    Google Scholar 

  54. M. Higashiwaki, K. Sasaki, T. Kamimura, M.H. Wong, D. Krishnamurthy, A. Kuramata, T. Masui, S. Yamakoshi, Appl. Phys. Lett. 103, 123511 (2013)

    Article  CAS  Google Scholar 

  55. M. Higashiwaki, K. Sasaki, M.H. Wong, T. Kamimura, D. Krishnamurthy, A. Kuramata, T. Masui, S. Yamakoshi, in Technical Digest of the IEEE International Electron Devices Meeting (2013)

    Google Scholar 

  56. A.J. Green, K.D. Chabak, E.R. Heller, R.C. Fitch, M. Baldini, A. Fiedler, K. Irmscher, G. Wagner, Z. Galazka, S.E. Tetlak, A. Crespo, K. Leedy, G.H. Jessen, IEEE Electron Device Lett. 37, 902 (2016)

    Article  Google Scholar 

  57. M.H. Wong, K. Sasaki, A. Kuramata, S. Yamakoshi, M. Higashiwaki, IEEE Electron Device Lett. 37, 212 (2016)

    Article  CAS  Google Scholar 

  58. E. Ahmadi, O.S. Koksaldi, X. Zheng, T. Mates, Y. Oshima, U.K. Mishra, J.S. Speck, Appl. Phys. Express 10, 071101 (2017)

    Article  Google Scholar 

  59. S. Krishnamoorthy, Z. Xia, C. Joishi, Y. Zhang, J. McGlone, J. Johnson, M. Brenner, A.R. Arehart, J. Hwang, S. Lodha, S. Rajan, Appl. Phys. Lett. 111, 023502 (2017)

    Article  CAS  Google Scholar 

  60. H. Zhou, K. Maize, G. Qiu, A. Shakouri, P.D. Ye, Appl. Phys. Lett. 111, 092102 (2017)

    Article  CAS  Google Scholar 

  61. K.D. Chabak, N. Moser, A.J. Green, D.E. Walker, S.E. Tetlak, E. Heller, A. Crespo, R. Fitch, J.P. McCandless, K. Leedy, M. Baldini, G. Wagner, Z. Galazka, X. Li, G. Jessen, Appl. Phys. Lett. 109, 213501 (2016)

    Article  CAS  Google Scholar 

  62. M.H. Wong, Y. Nakata, A. Kuramata, S. Yamakoshi, M. Higashiwaki, Appl. Phys. Express 10, 041101 (2017)

    Article  Google Scholar 

  63. K.D. Chabak, J.P. McCandless, N.A. Moser, A.J. Green, K. Mahalingam, A. Crespo, N. Hendricks, B.M. Howe, S.E. Tetlak, K. Leedy, R.C. Fitch, D. Wakimoto, K. Sasaki, A. Kuramata, G.H. Jessen, IEEE Electron Device Lett. 39, 67 (2018)

    Article  CAS  Google Scholar 

  64. T. Kamimura, Y. Nakata, M.H. Wong, M. Higashiwaki, IEEE Electron Device Lett. 40, 1064 (2019)

    Article  CAS  Google Scholar 

  65. Z. Hu, K. Nomoto, W. Li, N. Tanen, K. Sasaki, A. Kuramata, T. Nakamura, D. Jena, H.G. Xing, IEEE Electron Device Lett. 39, 869 (2018)

    Article  CAS  Google Scholar 

  66. M.H. Wong, K. Goto, H. Murakami, Y. Kumagai, M. Higashiwaki, IEEE Electron Device Lett. 40, 431 (2019)

    Article  CAS  Google Scholar 

  67. P. Feng, J.Y. Zhang, Q.H. Li, T.H. Wang, Appl. Phys. Lett. 88, 153107 (2006)

    Article  CAS  Google Scholar 

  68. T. Oshima, T. Okuno, N. Arai, N. Suzuki, S. Ohira, S. Fujita, Appl. Phys. Express 1, 011202 (2008)

    Article  CAS  Google Scholar 

  69. R. Suzuki, S. Nakagomi, Y. Kokubun, N. Arai, S. Ohira, Appl. Phys. Lett. 94, 222102 (2009)

    Article  CAS  Google Scholar 

  70. S. Nakagomi, T. Momo, S. Takahashi, Y. Kokubun, Appl. Phys. Lett. 103, 072105 (2013)

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Masataka Higashiwaki .

Editor information

Editors and Affiliations

Rights and permissions

Reprints and permissions

Copyright information

© 2020 Springer Nature Switzerland AG

About this chapter

Check for updates. Verify currency and authenticity via CrossMark

Cite this chapter

Higashiwaki, M. (2020). Introduction. In: Higashiwaki, M., Fujita, S. (eds) Gallium Oxide. Springer Series in Materials Science, vol 293. Springer, Cham. https://doi.org/10.1007/978-3-030-37153-1_1

Download citation

Publish with us

Policies and ethics