Abstract
There are a variety of optical microscopes in NNCI facilities, including many inside the cleanroom. Because the MEMS devices are so tiny, you may need to check the quality and integrity of your devices after each process. Just remember that some process steps, like a spin coat of photoresist, are light sensitive. Some rooms have darkroom-style amber lighting, but not all, so double-check where it is safe to transport your coated wafer.
This is a preview of subscription content, log in via an institution.
Buying options
Tax calculation will be finalised at checkout
Purchases are for personal use only
Learn about institutional subscriptionsAuthor information
Authors and Affiliations
Rights and permissions
Copyright information
© 2019 Springer Nature Switzerland AG
About this chapter
Cite this chapter
Munro, D. (2019). Imaging and Metrology. In: DIY MEMS. Springer, Cham. https://doi.org/10.1007/978-3-030-33073-6_9
Download citation
DOI: https://doi.org/10.1007/978-3-030-33073-6_9
Published:
Publisher Name: Springer, Cham
Print ISBN: 978-3-030-33072-9
Online ISBN: 978-3-030-33073-6
eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)