Abstract
In this chapter, we demonstrate that the combination of a unique cross-sectional polishing tool and SThM provides many advantages for nanothermal investigations of buried materials properties. From isotropic and anisotropic thin films, to thermal interface materials, nanothermal properties are extracted using appropriate models.
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Spièce, J. (2019). Three Dimensional Mapping of Thermal Properties. In: Quantitative Mapping of Nanothermal Transport via Scanning Thermal Microscopy. Springer Theses. Springer, Cham. https://doi.org/10.1007/978-3-030-30813-1_5
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DOI: https://doi.org/10.1007/978-3-030-30813-1_5
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