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Wavefront Sensor in Measurements of MEMS Vibrations

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Mechatronics 2019: Recent Advances Towards Industry 4.0 (MECHATRONICS 2019)

Part of the book series: Advances in Intelligent Systems and Computing ((AISC,volume 1044))

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Abstract

The paper discusses an application of Shack-Hartmann wavefront sensor with stroboscopic illumination for measurements of the vibration modes at resonance frequencies of a MEMS devices. The wavefront sensor estimates the local slopes of the wavefront by measuring the displacement of light spots created by microlens array on the camera plane. The goal of the work is to investigate the features of the proposed method. Amplitudes of vibration modes of a MEMS square membrane are measured and compared with data obtained from the stroboscopic interferometry realized in Twyman-Green configuration. The difference in PV values of the vibration amplitude is less than 52 nm (λ/12). It confirms the high accuracy of the measurement. Moreover, in this case the Shack-Hartmann wavefront sensor enables to simplify the system configuration and reducing the impact of the environmental conditions on the measurement result.

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Acknowledgements

This work was supported by statutory funds of the Warsaw University of Technology.

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Authors and Affiliations

  1. Faculty of Mechatronics, Institute of Micromechanics and Photonics, Warsaw University of Technology, Warsaw, Poland

    Michał Józwik

  2. Graduate of Faculty of Mechatronics, Warsaw University of Technology, Warsaw, Poland

    Dinesh Raja Nagarajan

Authors
  1. Michał Józwik
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  2. Dinesh Raja Nagarajan
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Corresponding author

Correspondence to Michał Józwik .

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Editors and Affiliations

  1. Warsaw University of Technology, Institute of Metrology and Biomedical Engineering, Faculty of Mechatronics, Warsaw, Poland

    Roman Szewczyk

  2. Faculty of Mechanical Engineering, Brno University of Technology, Brno, Czech Republic

    Jiří Krejsa

  3. Warsaw University of Technology, Institute of Metrology and Biomedical Engineering, Faculty of Mechatronics, Warsaw, Poland

    Michał Nowicki

  4. Warsaw University of Technology, Institute of Metrology and Biomedical Engineering, Faculty of Mechatronics, Warsaw, Poland

    Anna Ostaszewska-Liżewska

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Józwik, M., Nagarajan, D.R. (2020). Wavefront Sensor in Measurements of MEMS Vibrations. In: Szewczyk, R., Krejsa, J., Nowicki, M., Ostaszewska-Liżewska, A. (eds) Mechatronics 2019: Recent Advances Towards Industry 4.0. MECHATRONICS 2019. Advances in Intelligent Systems and Computing, vol 1044. Springer, Cham. https://doi.org/10.1007/978-3-030-29993-4_15

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