Abstract
In this paper it is shown that one of the most important problems of technical progress development is productions automation. The leading place in the world on production and the number of the granted patents is occupied by microelectronic sensors of pressure. The retrospective analysis of patent, scientific and technical literature was made by authors. Importance of initial design stages was proved. The solution of a formalization problem of the processes description of information transformation in microelectronic capacitive pressure sensors by means of model’s development on the basis of the theory of energy and information circuit models is proposed. The parametric structural scheme is developed. Mathematical dependences of its quantities and parameters on actual physical quantities are defined. The adequacy of model is proved. The developed model is intended for the automated synthesis of new technical solutions at a stage of search design and for predesign of sensors’ output parameters at a stage of outline design.
This is a preview of subscription content, log in via an institution.
Buying options
Tax calculation will be finalised at checkout
Purchases are for personal use only
Learn about institutional subscriptionsReferences
Shikulskaya, O., Petrova, I., Shikulskiy, M.: The methods analysis of achievement of the required operational characteristics of microelectronic pressure sensors. Int. J. Eng. Sci. Res. Technol. (IJESS7) 6(4), 347–354 (2017)
Balzar, R., Krasnogenov, E., Abbasov, S.: Semiconductor vibrational frequency response sensor for pressure measurement. Phys. Tech. High Press. 2, 25–27 (1993). Pap. 30 Annu. Meet. Eur. High Pressure Res. group
Bao, M.-H., Yu, L.-Z., Wang, Y.: Micromachined beam-diaphragm structure improves performances of pressure transducer. In: Transducers 1989: Proceedings of the 5th International Conference on Solid-State Sensors and Actuators and Eurosensors III, Montreux, Lausanne, vol. 2, pp. 137–141, 25–30 June 1989
Bai-zar, R., Voronin, V., Krasnogenov, E., Bogdanova, N.: Operation of monocrystalline silicon resonator in a measuring circuit. Sens. Actuators A 30(1–2), 175–178 (1991). Pap. East-West Workshop Microelectron. Sens, Sozopol
Zook James, D., Burns David, W.: Resonant gauge with microbeam driven in constant electric field. Patent 5275055 USA. Honeywell Inc. - No 937068; Appl. 31.08.92; publish 04.01.94
Tilmans Hendricus, A.C.: Resonant mechanical sensor. Patent 5165289 USA, Johnson Service Co. - No 551523; appl. 10.07.90; publish 24.11.92
Ryan, K., Bryzek, J.: Sensor with new configuration of a touch element. Flexible miniature packaging from Lucas Nova sensor provides low-cost pressure sensor solutions to a wide variety of hostile media applications. Electron. Compon. News 39(4), 118–120 (1995)
Frische Richard, H.: Semiconductor pressure sensor. Patent 5142912 USA, MКИ5 G 01 L 9/06. Honeywell Inc. No 538956; Patent 15.06.90; publish 01.09.92
Keiichi, S., Osamu, T., Susumu, S., Toyota Chuo Kenkyusho, K.K.: Semiconductor pressure sensor. Patent 5163329 USA, No 635953; Patent 28.12.90; publish. 17.11.92.; HКИ 73/721
Tetsuo, F., Yoshitaka, G., Susumu, K.: Fabrication of microdiaphragm pressure sensor utilizing micromachining. Sens. Actuators A 34(3), 217–224 (1992)
Tehn, R., Werthschutzky, M.: Silizium sensoren inprozeB-meBgeraten, Zar Druckmessung- Stand and Tendenzen, No. 9, pp. 340–346 (1992)
Wilfried, G., Gunter, K.: Mechanical decoupling of monolithic pressure sensor in small plastic encapc. In: Transducers 1989: Proceedings of the 5th International Conference on Solid-State Sensor and Actuators and Eurusensors III, Montreux, Lausane, vol. 2, pp. 1065–1069 (1989)
Wang, Y., Liu, L., Zheng, X., Li, Z.: A novel pressure sensor structure for integrated sensors. In: Transducers 1989: Proceedings of the 5th International Conference on Solid-State Sensors and Actuators and Eurosensors III, Montreux, Lausanne, 25–30 June, vol. 2, pp. 62–64 (1989). Appl. 2235773 1989, 1990
Dvoryankin, A.M., Polovinkin, A.I., Sobolev, A.N.: Automating the search for operation principles of technical systems on the basis of a bank of physical phenomena. Cybernetics 14, 79–86 (1978)
Andreychikov, A.V., Dvoryankin, A.M., Polovinkin, A.I.: Using expert systems in an automated bank of engineering knowledge for development and design by search. Sov. J. Comput. Syst. Sci. 27, 41–46 (1989)
Fomenkov, S.A., Korobkin, D.M., Kolesnikov, S.G., Kamaev, V.A., Kravets, A.G.: The automated methods of search of physical effects. Int. J. Soft Comput. 10, 234–238 (2015)
Korobkin, D.M., Fomenkov, S.A., Kolesnikov, S.G., Kizim, A.V., Kamaev, V.A.: Processing of structured physical knowledge in the form of physical effects. In: Proceedings of the European Conference on Data Mining 2015, ECDM 2015 and International Conferences on Intelligent Systems and Agents 2015, ISA 2015 and Theory and Practice in Modern Computing 2015, TPMC 2015 - Part of the Multi Conference on Computer Science and Information Systems 2015 (2015)
Fomenkova, M.A., Kamaev, V.A., Korobkin, D.M., Fomenkov, S.A.: The methodology of semantic analysis for extracting physical effects. J. Phys. Conf. Ser. 803, 1–6 (2017)
Petrova, I., Shikulskaya, O., Shikulskiy, M.: Conceptual modeling methodology of multifunction sensors on the basis of a fractal approach. Adv. Mater. Res. 875–877, 951–956 (2014)
Shikul’skaya, O.M., Nezametdinova, É.R.: Modernization of a conceptual model of a data bank for physicotechnical effects based on contemporary information technology. Meas. Tech. 50(1), 7–9 (2007)
Shikul’skya, O.M., Konstantinova, O.S.: Synthesis of new designs based on modern technologies. Meas. Tech. 52(8), 829–832 (2009)
Zaripova, V., Petrova, I., Lezhnina, Y.: Designing the module “Methods for activating engineering creativity” on basis of competence approach. Recent Pat. Comput. Sci. 9(2), 160–165 (2016)
Zaripova, V., Petrova, I.: Knowledge-based support for innovative design on basis of energy-information method of circuits. In: Kravets, A., Shcherbakov, M., Kultsova, M., Iijima, T. (eds.) JCKBSE 2014. CCIS, vol. 466, pp. 521–532. Springer, Cham (2014). https://doi.org/10.1007/978-3-319-11854-3_45
Shikul’skaya, O.M.: A recurrent model for a line with distributed parameters and quantities. Meas. Tech. 50(3), 245–248 (2007)
Shikulskaya, O.M., Shikulskiy, M.I.: Energy-information modelling of the flat membrane on the fractal approach basis. J. Phys. Conf. Ser. 803(1), 1–6 (2017). Article id: 012145, Open Access
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2019 Springer Nature Switzerland AG
About this paper
Cite this paper
Shikulskiy, M. et al. (2019). Structural and Parametrical Model of the Physical Functional Principle of the Microelectronic Capacitive Pressure Sensor. In: Kravets, A., Groumpos, P., Shcherbakov, M., Kultsova, M. (eds) Creativity in Intelligent Technologies and Data Science. CIT&DS 2019. Communications in Computer and Information Science, vol 1083. Springer, Cham. https://doi.org/10.1007/978-3-030-29743-5_24
Download citation
DOI: https://doi.org/10.1007/978-3-030-29743-5_24
Published:
Publisher Name: Springer, Cham
Print ISBN: 978-3-030-29742-8
Online ISBN: 978-3-030-29743-5
eBook Packages: Computer ScienceComputer Science (R0)