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A Practical Guide to Surface Metrology pp 95–198Cite as

Optical Surface Metrology: Methods

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Part of the book series: Springer Series in Measurement Science and Technology ((SSMST))

Abstract

The techniques in surface metrology with the largest diversity are based on electrodynamics, more precise on the interaction of electromagnetic waves with the surface of the workpiece. State-of-the-art camera technology, proper attention to the internal optical design, light sources, and computing capabilities have led to impressive optical metrology systems with considerable specifications. The most relevant techniques are discussed in the following Sects. 5.1, 5.2, 5.3, 5.4, 5.5, 5.6, 5.7, 5.8, 5.9, and 5.10.

This chapter comprises the following methods:

  • Confocal Optical Profiling,

  • Light Sectional Methods,

  • Various Microscopy Methods,

  • Various Interferometric Methods,

  • Wave Front Sensing,

  • Deflectometry,

  • Elastic Light Scattering, and

  • Spectral Analysis and Characterization.

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Quinten, M. (2019). Optical Surface Metrology: Methods. In: A Practical Guide to Surface Metrology. Springer Series in Measurement Science and Technology. Springer, Cham. https://doi.org/10.1007/978-3-030-29454-0_5

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