Abstract
Interactions among a surface and a probing unit are not restricted on mechanical forces. This became evident already from the extensions of the atomic force microscope in the previous chapter. Strong interactions can also occur for long-range electrical and magnetic forces. This Chapter deals with the most common surface metrology methods based on electrical fields -the capacitive surface profiling- as well as magnetic fields -the profiling with eddy currents.
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Quinten, M. (2019). Capacitive and Inductive Surface Metrology. In: A Practical Guide to Surface Metrology. Springer Series in Measurement Science and Technology. Springer, Cham. https://doi.org/10.1007/978-3-030-29454-0_3
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DOI: https://doi.org/10.1007/978-3-030-29454-0_3
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