Abstract
Visible-shortwave infrared imaging spectrometers for deep space exploration need to meet the requirements of wide spectrum coverage, high spectral resolution and miniaturization. This chapter explores the achievement of higher and more consistent diffraction efficiency of the partition multiplexing convex grating in the visible-shortwave infrared (0.4–2.5 μm). The investigation of the diffraction efficiency indicates that when the two blaze angles of the convex grating, one between 5.6° and 6.5° and the other between 16.5° and 17.5°, the first-order diffraction efficiency would be over 25% at the visible-shortwave infrared band. The partition multiplexing convex grating with 408 L/mm, a curvature radius of 51.64 mm, an aperture of 30 mm, with the two blaze angles 6.3° and 17.3°, respectively, and the two antiblaze angles 66° and 56°, has been fabricated by holographic lithography—segmented scan ion beam etching.
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Acknowledgments
This research is supported by the National Science and Technology Major Project of China (GFZX04061502), the National Key R&D Program of China (2016YFB0500501), the National Natural Science Foundation of China (60907017), the Opening fund of Shanghai Key Laboratory of All Solid-state Laser and Applied Techniques (2014ADL02), the Suzhou Science and Technology Department (SYG201328), and the Priority Academic Program Development of Jiangsu Higher Education Institutions (PAPD).
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Liu, Q., Guo, P., Wu, J. (2020). Fabrication of the Partition Multiplexing Convex Grating. In: Urbach, H., Yu, Q. (eds) 5th International Symposium of Space Optical Instruments and Applications. ISSOIA 2018. Springer Proceedings in Physics, vol 232. Springer, Cham. https://doi.org/10.1007/978-3-030-27300-2_19
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DOI: https://doi.org/10.1007/978-3-030-27300-2_19
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