Abstract
With the more advanced pitch and roll gyroscope designs and microfabrication platform, achieving consistent high performance in all three axes using robust high-frequency resonant MEMS gyroscopes becomes possible. This chapter presents the first demonstration of a high-performance timing and inertial measurement unit (TIMU) with robust 3-axis resonant gyroscopes integrated and wafer-level packaged (WLP) on a single chip. Each of the integrated sensing elements on the TIMU demonstrated high performance with small form factor and high robustness, showing great potentials for navigational applications.
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References
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Wen, H. (2019). Integrated Inertial Measurement Unit. In: Toward Inertial-Navigation-on-Chip. Springer Theses. Springer, Cham. https://doi.org/10.1007/978-3-030-25470-4_5
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DOI: https://doi.org/10.1007/978-3-030-25470-4_5
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