Abstract
High-frequency resonant gyroscope technology developed in recent years promises robust high performance with mode-matched resonant operation. While high performance is shown in various resonant yaw gyroscopes, large discrepancies are seen between the promised and delivered performances in resonant pitch and roll gyroscopes. This chapter presents in detail the quadrature errors and bias instability limits in MEMS pitch and roll gyroscopes, which are the main challenges in developing high-performance single-chip MEMS triaxial gyroscopes and IMUs. The sources of errors are carefully studied, and effective solutions are developed. Experimental verifications of the solutions are achieved through advanced microfabrication methods and robust prototype designs.
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B.J. Gallacher et al., Electrostatic correction of structural imperfections present in a microring gyroscope. J. Microelectromech. Syst. 14(2), 221–234 (2005)
D.E. Serrano, Integrated Inertial Measurement Units Using Silicon Bulk-Acoustic Wave Gyroscopes (Georgia Institute of Technology, 2014)
H. Wen, A. Daruwalla, F. Ayazi, Resonant pitch and roll silicon gyroscopes with sub-micron-gap slanted electrodes: Breaking the barrier toward high-performance monolithic inertial measurement units. Microsyst. Nanoeng. 3, 16092 (2017)
S. Franssila, Anisotropic wet etching, in Introduction to Microfabrication, (John Wiley & Sons, Ltd, Hoboken, 2010), pp. 237–254
P. Prem, C. Sudhir, A novel process for perfect convex corner realization in bulk micromachining. J. Micromech. Microeng. 14(10), 1416 (2004)
B. Kim et al., Temperature dependence of quality factor in MEMS resonators, in 19th IEEE International Conference on Micro Electro Mechanical Systems, (2006), pp. 590–593
S. Ghaffari et al., Quantum limit of quality factor in silicon micro and nano mechanical resonators. Sci. Rep. 3, 3244 (2013)
R. Tabrizian, M. Rais-Zadeh, F. Ayazi, Effect of phonon interactions on limiting the f.Q product of micromechanical resonators, in TRANSDUCERS 2009–2009 International Solid-State Sensors, Actuators and Microsystems Conference, (2009), pp. 2131–2134
H. Wen, A. Daruwalla, F. Ayazi, A 0.5MHz mode-matched pitch or roll annulus gyroscope with nano-gap slanted electrodes for quadrature cancellation, in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), (IEEE, 2017), pp. 536–539. © 2017 IEEE. Figures and tables reprinted with permission
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Wen, H. (2019). Bias Control in Pitch and Roll Gyroscopes. In: Toward Inertial-Navigation-on-Chip. Springer Theses. Springer, Cham. https://doi.org/10.1007/978-3-030-25470-4_3
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DOI: https://doi.org/10.1007/978-3-030-25470-4_3
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