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Flash Lamp Annealing pp 1–14Cite as

Introduction

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Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 288))

Abstract

This chapter gives a brief history of thermal treatments in general and flash lamp annealing in particular. It introduces the basic thermodynamic values thermal diffusivity, thermal diffusion length and thermal response time, discusses the concept of thermal budget, and provides a comparison of the three main methods of short time annealing, namely rapid thermal annealing, flash lamp annealing, and laser annealing.

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  1. Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden Rossendorf, Dresden, Germany

    Lars Rebohle

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Rebohle, L. (2019). Introduction. In: Flash Lamp Annealing. Springer Series in Materials Science, vol 288. Springer, Cham. https://doi.org/10.1007/978-3-030-23299-3_1

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