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Robust Adaptive Resonant Damping Control of Nanopositioning

  • Wei Wei
  • Pengfei Xia
  • Zaiwen Liu
  • Min ZuoEmail author
Conference paper
Part of the Lecture Notes in Computer Science book series (LNCS, volume 11555)

Abstract

Hysteresis and vibration are main factors in reducing the accuracy and the speed of a nanopositioner. In order to improve the positioning accuracy and the speed, a robust adaptive resonant damping control is proposed for trajectory tracking of a nanopositioner system driven by a piezoelectric actuator. Radial basis function neural network is employed to approximate unknown nonlinearities in the controller so as to reduce the dependence on model information. Linear and hysteresis model are establish based on nanopositioning stage measured data. The proposed control strategy is verified by simulation using an identified model.

Keywords

Piezoelectric actuators Robust adaptive Resonant damping Radial basis function Hysteresis 

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Copyright information

© Springer Nature Switzerland AG 2019

Authors and Affiliations

  1. 1.School of Computer and Information EngineeringBeijing Technology and Business UniversityBeijingChina

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