Abstract
Optimization plays a key role in the design of any device or system, and this is especially true for MEMSs. The issue is to find a design space for a device which will satisfy the performance specifications. Often, they include several design criteria which cannot all be met at the same time. This leads to the concept of multi-objective optimization, i.e., a search which attempts to satisfy several goals simultaneously.
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Mognaschi, M.E. (2020). Numerical Case Studies: Inverse Problems. In: MEMS: Field Models and Optimal Design. Lecture Notes in Electrical Engineering, vol 573 . Springer, Cham. https://doi.org/10.1007/978-3-030-21496-8_14
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DOI: https://doi.org/10.1007/978-3-030-21496-8_14
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