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Numerical Case Studies: Forward Problems

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Book cover MEMS: Field Models and Optimal Design

Part of the book series: Lecture Notes in Electrical Engineering ((LNEE,volume 573 ))

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Abstract

Electrostatic micromotors were the first MEMS which had been designed and prototyped exploiting Silicon integrated technology.

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References

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Authors and Affiliations

  1. Department of Electrical, Computer and Biomedical Engineering, University of Pavia, Pavia, Italy

    Paolo Di Barba & Maria Evelina Mognaschi

Authors
  1. Paolo Di Barba
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  2. Maria Evelina Mognaschi
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Correspondence to Paolo Di Barba .

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Di Barba, P., Mognaschi, M.E. (2020). Numerical Case Studies: Forward Problems. In: MEMS: Field Models and Optimal Design. Lecture Notes in Electrical Engineering, vol 573 . Springer, Cham. https://doi.org/10.1007/978-3-030-21496-8_13

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  • DOI: https://doi.org/10.1007/978-3-030-21496-8_13

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  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-030-21495-1

  • Online ISBN: 978-3-030-21496-8

  • eBook Packages: EngineeringEngineering (R0)

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