Abstract
Nonconventional micromachining processes are developed to meet the manufacturing requirements of new materials and products where usual processes are found inadequate. Based on the type of energy used for material removal, the different micromachining processes are classified into thermal, mechanical, chemical and hybrid processes. Hybrid processes combine two or more machining processes to achieve the desired machining. Descriptions of the important micromachining processes, their material removal mechanism and salient application fields are dealt with in this chapter.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Abbreviations
- AEDMM:
-
Abrasive electro-discharge micro-machining
- AJM:
-
Abrasive jet machining
- AWJM:
-
Abrasive water jet machining
- CAD:
-
Computer aided design
- CAM:
-
Computer aided manufacturing
- CD:
-
Chemical dissolution
- CHM:
-
Chemical milling
- CMM:
-
Coordinate measuring machine
- CNC:
-
Computer numerical control
- DC:
-
Direct current
- ECD:
-
Electrochemical dissolution
- ECDG:
-
Electrochemical discharge grinding
- ECDM:
-
Electrochemical discharge machining
- ECG:
-
Electrochemical grinding
- ECM:
-
Electrochemical machining
- EDM:
-
Electro discharge machining
- G:
-
Grinding
- HAZ:
-
Heat-affected zone
- IBMM:
-
Ion beam micro-machining
- IEG:
-
Inter-electrode gap
- LBM:
-
Laser beam machining
- MRR:
-
Material removal rate
- PMMA:
-
Polymethyl methacrylate
- PZT:
-
Piezoelectric transducer
- UHP:
-
Ultra high power
- USM:
-
Ultrasonic machining
- USMEC:
-
Ultrasonic-assisted electrochemical machining
- VAM:
-
Vibration assisted machining
- WJ:
-
Waterjet
- WJM:
-
Water jet machining
References
Jain VK (2009) Magnetic field assisted abrasive based micro-/nano-finishing. J Mater Process Technol 209(20):6022–6038
Snoeys R, Staelens F, Dekeyser W (1986) Current trends in non-conventional material removal processes. Ann CIRP 35(2)
Taniguchi N (1983) Current status in, and future trends of ultraprecision machining and ultrafine materials processing. Ann CIRP 32(2):573–582
Ashby MF (2010) Materials selection in mechanical design. Elsevier, USA
Hofy HE (2005) Advanced machining processes non-traditional and hybrid machining processes. McGraw-Hill, New York
Kibria G, Bhattacharyya B, Davim JP (2017) Non-traditional micromachining processes fundamentals and applications. Springer, pp. 63–65
Snoeys R, Staelens F, Dekeyser F (1986) Current trends in non-conventional material removal processes. Ann CIRP 35:467–480
Egashira K, Masuzawa T (1999) Microultrasonic machining by the application of workpiece vibration. CIRP Ann—Manuf Technol 48(1):131–134
Kremer D, Saleh SM, Ghabrial SR, Moisan A (1981) The state of the art of ultrasonic machining. CIRP Ann—Manuf Technol 30(1):107–110
Egashira K, Masuzawa T (1999) Micro ultrasonic machining by the application of workpiece vibration. CIRP Ann—Manuf Technol 48:131–134
Sun XQ, Masuzawa T, Fujino M (1996) Micro ultrasonic machining and self-aligned multilayer machining/assembly technologies for 3D micro machines. In: Proceedings of the IEEE micro electro mechanical systems (MEMS’96), pp 312–317
Boy JJ, Andrey E, Boulouize A, Khan-Malek C (2010) Developments in microultrasonic machining (MUSM) at FEMTO-ST. Int J Adv Manuf Technol 47:37–45
Yu ZY, Rajurkar KP, Tandon A (2004) Study of 3D microultrasonic machining. J Manuf Sci Eng, Trans ASME 126:727–732
Curodeau A, Guay J, Rodrigue D, Brault L, Gagné D, Beaudoin LP (2008) Ultrasonic abrasive l-machining with thermoplastic tooling. Int J Mach Tools Manuf 48:1553–1561
Wakuda M, Yamauchi Y, Kanzaki S (2003) Material response to particle impact during abrasive jet machining of alumina ceramics. J Mater Process Technol 132(1–3):177–183
Haldar B, Adak DK, Ghosh D, Karmakar A, Habtamu E, Ahmed M, Das S (2018) Present status and some critical issues of abrasive jet materials processing: a review. Procedia Manuf 20:523–529
Chastagner MW, Shih AJ, Arbor A (2007) Trans NAMRI/SME 35:359–366
Finnie Iain (1960) Wear 3:87–103
R.H. Mohammad Jafar, J.K. Spelt, M. Papini, Wear 303 (2013) 138–145
Mishra PK (2014) Nonconventional machining. Narosa, India
Nouhi A, Kowsari K, Spelt JK, Papini M (2016) Abrasive jet machining of channels on highly-curved glass and PMMA surfaces. Wear 356–357:30–39
El-Domiaty A, Abd El-Hafez HM, Shaker MA (2009) Drilling of glass sheets by abrasive jet machining, world academy of science, engineering and technology. Int J Mech Aerosp Ind Mechatron Manuf Eng 3:8
Benedict GF (1987) Non-traditional manufacturing processes. Marcel Dekker Inc., New York
Getu H, Ghobeity A, Spelt JK, Papini M (2007) Abrasive jet micromachining of polymethylmethacrylate. Wear 263:1008–1015
Getu H, Ghobeity A, Spelt JK, Papini M (2008) Abrasive jet micromachining of acrylic and polycarbonate polymers at oblique angles of attack. Wear https://doi.org/10.1016/j.wear01.013
Belloy E, Thurre S, Walckiers E, Sayah A, Gijs MAM (2000) The introduction of powder blasting for sensor and microsystems applications. Sens Actuators: A: Phys 84:330–337
Pawlowski A, Belloy E, Sayah A, Gijs MAM (2003) Powder blasting patterning technology for microfabrication of complex suspended structures in glass. Microelectron Eng 67–68:557–565
Liu HT, Schubert E (2012) Micro abrasive-waterjet technology. In: Micromachining techniques for fabrication of micro and nano structured, vol 10, pp 205–234
Liu HT, Hovanski Y, Caldwell DD, Williford RE (2008) Low-cost manufacturing of flow channels with multi-nozzle abrasive-waterjets: a feasibility investigation. In: Proceedings of the 19th international conference on water jetting, pp 337–351
Liu H-T (2010) Waterjet technology for machining fine features pertaining to micromachining. J Manuf Process 12:8–18
Miller DS (2003) Developments in abrasive waterjets for micromachining. In: Proceedings of the 2003 WJTA American waterjet conference 2003
Liu HT (2016) Versatility of micro abrasive waterjet technology for machining nanomaterials. Encyclopaedia of Nanoscience and Nanotechnology, 3rd edn. CRC Press, Boca Raton
Liu HT, McNiel D (2010) Versatility of waterjet technology: from macro and micro machining for most materials. In: Proceedings of the 20th international conf. on water jetting, pp 419–433. BHR Group, Cranfield
Haghbin N, Spelt JK, Papini M (2015) Abrasive waterjet micro-machining of channels in metals: comparison between machining in air and submerged in water. Int J Mach Tools Manuf 88:108–117
Liu HT (2006) Collateral damage by stagnation pressure buildup during abrasive-fluid jet piercing. In: Proceedings of the 18th international conference on water jetting, pp 47–61. BHR Group, Cranfield
Filiz S, Conley CM, Wasserman MB, Burak Ozdoganlar N (2007) An experimental investigation of micromachinability of copper 101 using tungsten carbide micro-endmills. Int J Machine Tools Manuf 47:1088–1100
Snoeys R, Staelens F, Dekeyser W (1986) Current trends in non-conventional material removal processes. Ann CIRP 35(2):467–480
Tam SC, Williams R, Yang LJ, Jana S, Lim LE, Lau MW (1990) Laser processing of air craft components. J Mater Process Technol 32:177–194
Yeo C, Tam S, Jana S, Lau M (1994) A technical review of laser drilling of aerospace materials. J Mat Process Technol 42:15–49
Ueda T, Yamada K, Nakayama K (1997) Temperature of workpiece material irradiated with CO2 laser. Ann CIRP 46(1):117–122
Spur G, Appel S, Liebelt S (1997) Non-linear modelling and simulation of laser cutting and grooving of fiber reinforced thermo plastics. In: 32nd MATADOR conference, Manchester, pp 381–386
Sen A, Doloi B, Bhattacharyya B (2014) Experimental studies on fibre laser micromachining of Ti-6Al-4 V. In: 5th international & 26th all India manufacturing technology, design and research conference (AIMTDR 2014)
Rizvi NH (2003) Femtosecond laser micromachining: current status and applications. Riken Review 50:107–112
Loeschner U, Mauersberger S, Ebert R (2008) Micromachining of glass with short ns-pulses and highly repetitive fs-laser pulses. In: Proceedings of the 27th international congress on applications of lasers and electro-optics (ICALEO ’08), pp 193–201
Rizvi N (2003) Femtosecond laser micromachining: current status and applications. Riken Rev 50:77–82
Gower MC (2000) Industrial application of laser micromachining. Opt Express 7:56–67
Kunieda M, Yoshida M (1997) Electrical discharge machining in gas. Ann CIRP 46(1):143–146
Lin YC, Chen YF, Wang AC, Sei WL (2012) Machining performance on hybrid process of abrasive jet machining and electrical discharge machining. Trans Nonferrous Met Soc China 22:s775–s780
Jameson EC (2001) Description and development of electrical discharge machining (EDM). In: Electrical discharge machining, society of manufacturing engineers, Dearbern, Michigan, p 12
Newman ST, Ho KH (2003) The state of art—electrical discharge machining. Int J Mach Tools Manuf 43:1287–1300
Koch O, Ehrfeld W, Michel F, Gruber HP (2001) Recent progress in micro-electro discharge machining technology—part 1. In: Proceedings of the 13th international symposium for electromachining ISEM XIII, Bilbao, Spain
Jahan MP, Rahman M, Wong YS, Fuhua L (2010) On-machine fabrication of high-aspect-ratio microelectrodes and application in vibration-assisted micro- EDM drilling of tungsten carbide. Proc Inst Mech Eng Part B: J Eng Manuf 224:795–814
Takahata K, Shibaike N, Guckel H (2000) High-aspect-ratio WC–Co microstructure produced by the combination of LIGA and micro-EDM. Microsyst Technol 6:175–178
Liu K, Lauwers B, Reynaerts D (2010) Process capabilities of Micro-EDM and its applications. Int J Adv Manuf Technol 47:11–19
Liao YS et al (2005) Fabrication of high aspect ratio microstructure arrays by micro reverse wire-EDM. J Micromech Microeng 15:1547
Lin CS et al (2010) Fabrication of micro ball joint by using micro-EDM and electroforming. Microelectron Eng 87:1475–1478
Gao G, Zhao W, Wang Z, Gou Y (2005) Instantaneous fabrication of tungsten microelectrode based on single electrical discharge. J Mat Process Technol 168:83–88
Sahu RK, Hiremath Somashekhar S, Manivannan PV, Singaperumal M (2014) Generation and characterization of copper nanoparticles using micro-electrical discharge machining. Mat Manuf Process 29(4):477–486
HMT Production Technology (1986), 1st edn, McGraw Hill Education (India) Pvt. Ltd.
Han MS, Min BK, Lee SJ (2011) Micro-electrochemical discharge cutting of glass using a surface-textured tool. CIRP J Manuf Sci Technol 4(4):362–369
Kibria G, Bhattacharyya B, Davim JP (2017) Non-traditional micromachining processes. Springer
Das AK, Saha P (2013) Machining of circular micro holes by electrochemical micro-machining process. Adv Manuf 1:314–319
Lohrengel MM, Kluppel I, Rosenkranz C, Bettermann H, Schultze JW (2003) Microscopic investigations of electrochemical machining of Fe in NaNO3. Electrochimia Acta 48:3203–3211
Kozak J, Rajurkar KP, Wei B (1994) Modeling and analysis of pulse electrochemical machining. Transac ASME 116:316–323
Landolt D, Chauvy PF, Zinger O (2003) Electrochemical micro machining, polishing and surface structuring of metals: fundamental aspects and new developments. Electrochimia Acta 48:3185–3201
Datta M, Landolt D (2000) Fundamental aspects and applications of electrochemical micro fabrication. Electrochimia Acta 45:2535–2558
Bassu M, Strambini LM, Barillaro G (2011) Advances in electrochemical micromachining of silicon: towards MEMS fabrication. Procedia Eng 25:1653–1656
Munda J, Malapati M, Bhattacharyya B (2007) Control of microspark and stray-current effect during EMM process. J Mat Process Technol 194:151–158
Karunakaran K, Pushpa V, Akula S, Suryakumar S (2008) Techno-economic analysis of hybrid layered manufacturing. Int J Intell Syst Technol Appl 4:161–176
Gupta K, Jain NK, Laubscher RF (2016) Hybrid machining processes: perspectives on machining and finishing. Springer
Heisel U, Wallaschek J, Eisseler R, Potthast C (2008) Ultrasonic deep hole drilling in electrolytic copper ECu 57. CIRP Ann-Manuf Technol 57:53–56
Lauwers B, Klocke F, Klink A (2014) Hybrid processes in manufacturing. CIRP Ann-Manuf Techn 63:561–583
Paul L (2015) Characterisation of micro features produced using micro ECDM process: experimental and theoretic investigation. A dissertation submitted for doctoral degrees, IIT Madras, India
Fascio V, Langen HH, Bleuler H, Comninellis C (2003) Investigations of the spark assisted chemical engraving. Electrochem Commun 5:203–207
Khairy ABE, Mcgeough JA (1990) Die-sinking by electro erosion-dissolution machining, CIRP Ann. Manuf Technol 39:191–195
Didar TF, Dolatabadi A, Wüthrich R (2008) Characterization and modeling of 2D glass micro-machining by spark-assisted chemical engraving (SACE) with constant velocity. J Micromech Micro Eng 18:9
Jain VK, Chak SK (2000) Electrochemical spark trepanning of alumina and quartz. Mach Sci Technol 4:277–290
Furutani K, Maeda H (2008) Machining a glass rod with a lathe-type electro-chemical discharge machine. J Micromech Microeng 18:8
Schöpf M, Beltram I, Boccadoro M, Kramer D (2001) ECDM (Electrochemical discharge machining) a new method for trueing and dressing of metal bonded diamond grinding tools. CIRP Ann Manuf Technol 50:125–128
Peng WY, Liao YS (2004) Study of electrochemical discharge machining technology for slicing non-conductive brittle materials. J Mater Process Technol 149:363–369
Paul Lijo, Hiremath Somashekhar S (2016) Experimental and theoretical investigations in ECDM process—an overview. Procedia Technol 25:1242–1249
Paul Lijo, Hiremath Somashekhar S (2016) Improvement in machining rate with mixed electrolyte in ECDM process. Procedia Technol 25:1250–1256
Paul Lijo, Hiremath Somashekhar S (2013) Response surface modelling of micro holes in electrochemical discharge machining process. Procedia Eng 64:1395–1404
Paul Lijo, George Bibin P, Varghese Ashwin (2018) FEM of ECDM process on semi conducting materials. Appl Mech Mat 877:87–91
Paul Lijo, Hiremath Somashekhar S (2014) Characterisation of micro channels in electrochemical discharge machining process. Appl Mech Mat 490:238–242
Paul Lijo, George Bibin P, Varghese Ashwin (2018) Characterisation of Micro Channels Machined with ECDM for Fluidic Applications. Appl Mech Mat 877:82–86
Jain Vijay K, Gehlot Dileep (2015) Anode shape prediction in through-mask-ECMM using FEM. Mach Sci Technol 19(2):286–312
Solignac D, Sayah A, Constantin S, Freitag R, Gijs MA (2001) Powder blasting for realization of microchips for bio-analytic applications. Sens Actuators A 92:388–393
Liu C, Chen J, Engel J, Zou J, Wang X, Fan Z, Ryu K, Shaikh K, Bullen D (2003) Polymer micromachining and applications in sensors, microfluidics, and nanotechnology. In: 226th national meeting of the american chemical society (ACS), New York
Lin YC, Chen YF, Wang AC, Sei WL (2012) Machining performance on hybrid process of abrasive jet machining and electrical discharge machining. Trans Met Soc China 22:775–780
Singh T, Dvivedi A (2016) Developments in electrochemical discharge machining: a review on electrochemical discharge machining, process variants and their hybrid methods. Int J Mach Tools Manuf 105:1–13
Han MS, Min BK, Lee SJ (2007) Improvement of surface integrity of electro-chemical discharge machining process using powder-mixed electrolyte. J Mat Process Technol 191:224–227
Goud M, Sharma AK, Jawalkar C (2016) A review on material removal mechanism in electrochemical discharge machining (ECDM) and possibilities to enhance the material removal rate. Precis Eng 45:1–17
Thoe TB, Aspinwall DK, Wise ML (1998) Review on ultrasonic machining. Int J Mach Tools Manuf 38239–38355
Yu Z, Rajurkar KP, Tandon A (2004) Study of 3D micro-ultrasonic machining. J Manuf Sci Eng 126
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2020 Springer Nature Switzerland AG
About this chapter
Cite this chapter
Paul, L., Babu, J., Paulo Davim, J. (2020). Non-conventional Micro-machining Processes. In: Gupta, K. (eds) Materials Forming, Machining and Post Processing. Materials Forming, Machining and Tribology. Springer, Cham. https://doi.org/10.1007/978-3-030-18854-2_5
Download citation
DOI: https://doi.org/10.1007/978-3-030-18854-2_5
Published:
Publisher Name: Springer, Cham
Print ISBN: 978-3-030-18853-5
Online ISBN: 978-3-030-18854-2
eBook Packages: EngineeringEngineering (R0)