Abstract
A sphere is frequently used as a reference for calibration of 3-dimensional measurement instruments because of its isotropic shape. Assuring an accuracy of the reference sphere is responsible for measurement uncertainty. Therefore, sphericity and diameter of the reference sphere need to be guaranteed with high accuracy. For micro-scale 3-dimentional metrology, size of the reference sphere is also micro-scale from several millimeters to a few tens of micrometers. These spheres have to be measured with accuracy of better than 10 nm. We have proposed the new measurement method of a microsphere based on whispering gallery mode resonances. One of the key points to the proposed method is to measure the whispering gallery mode resonant wavelength accurately. In this paper, the measurement instruments of whispering gallery mode resonances in the microsphere was developed.
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Acknowledgement
This work was financially supported by the Foundation for Interaction in Science & Technology, Mizuho Foundation for the Promotion of Sciences, A-STEP from JST, and MEXT/JSPS KAKENHI (No. 18K18803, 15H05505).
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Michihata, M., Kobayashi, Y., Chu, B., Takamasu, K., Takahashi, S. (2019). System Development for Microsphere Measurement Based on Whispering Gallery Mode Resonance. In: Majstorovic, V., Durakbasa, N. (eds) Proceedings of the 12th International Conference on Measurement and Quality Control - Cyber Physical Issue. IMEKOTC14 2019. Lecture Notes in Mechanical Engineering. Springer, Cham. https://doi.org/10.1007/978-3-030-18177-2_2
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DOI: https://doi.org/10.1007/978-3-030-18177-2_2
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