Dry Surface Micromanipulation Using an Untethered Magnetic Microrobot

Abstract

Precise micromanipulation tasks are typically performed using micromanipulators that require an accessible workspace to reach components. However, many applications, such as assembly of optical components, require clean workspaces which can be challenging to establish and operate. This work presents a magnetically-guided, and untethered, actuation method for precise and accurate positioning of microcomponents on a dry surface within a remote workspace using a magnetic microrobot. This method enables shrinkage of room-sized workspaces down to a minimum volume as external access for a human operator may not be required. By use of an oscillatory and uniform magnetic field, the magnetic microrobot can traverse on a dry surface with a fine step size and accurate open-loop vector following, 3% and 2% of its body-length, respectively (step size of 7 μm). While maintaining precise positioning capability, the microrobot can manipulate and carry other microcomponents on a dry surface using direct pushing or grasping using various attachments, respectively. We demonstrate and characterize the untethered micromanipulation capabilities of this method using a 3 mm cubic microrobot for use in applications such as microassembly and cargo transport.