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Conductive AFM of 2D Materials and Heterostructures for Nanoelectronics

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Electrical Atomic Force Microscopy for Nanoelectronics

Part of the book series: NanoScience and Technology ((NANO))

Abstract

Two-dimensional materials (2DM), such as the semimetal graphene, semiconducting MoS2 and insulating h-BN, are currently the object of wide interests for next generation electronic applications. Despite recent progresses in large area synthesis of 2DMs, their electronic properties are still affected by nano- or micro-scale defects/inhomogeneities related to the specific growth process. Electrical scanning probe methods, such as conductive atomic force microscopy (C-AFM), are essential tools to investigate charge transport phenomena in 2DMs with nanoscale resolution. This chapter illustrates some case studies of C-AFM applications to graphene, MoS2 and h-BN. Furthermore, the results of the nanoscale electrical characterization have been correlated to the behavior of macroscopic devices fabricated on these materials.

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Acknowledgements

The authors want to acknowledge these colleagues for useful discussions: E. Schilirò, S. Di Franco, P. Fiorenza, R. Lo Nigro, I. Deretzis, A. La Magna, G. Nicotra, (CNR-IMM, Catania, Italy). This work has been supported, in part, by the Flag-ERA project “GraNitE: Graphene heterostructures with Nitrides for high frequency Electronics”.

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  1. Consiglio Nazionale delle Ricerche, Institute for Microelectronics and Microsystems (CNR-IMM), Strada VIII, 5, 95121, Catania, Italy

    Filippo Giannazzo, Giuseppe Greco & Fabrizio Roccaforte

  2. Institute of Functional Nano & Soft Materials, Collaborative Innovation Center of the Ministry of Education, Soochow University, 199 Ren-Ai Road, Bld. 909, Office 3215, Suzhou, 215123, China

    Chandreswar Mahata & Mario Lanza

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    Umberto Celano

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Giannazzo, F., Greco, G., Roccaforte, F., Mahata, C., Lanza, M. (2019). Conductive AFM of 2D Materials and Heterostructures for Nanoelectronics. In: Celano, U. (eds) Electrical Atomic Force Microscopy for Nanoelectronics. NanoScience and Technology. Springer, Cham. https://doi.org/10.1007/978-3-030-15612-1_10

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