Abstract
The design of an AFM has to enable two different tasks: First it has to allow for a xyz-motion during scanning (fine motion, or scan motion), for the acquisition of the surface topography. As the range of the piezo actuators performing this motion is limited to usually \({<}100\,\mathrm {\upmu m}\), the second task of an AFM design is to bring the cantilever tip and the sample initially so close together, that their distance is within the range of the z-fine motion. This task is called the coarse approach. Both of these tasks have to be satisfied while simultaneously maintaining a stiff mechanical structure with high resonance frequencies allowing for good vibration isolation and small (thermal) drift of the tip relative to the sample. In this chapter we discuss several types of coarse positioners as well as scanners for the fine motion and introduce the principles of some particular AFM designs.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
D.W. Pohl, Dynamic piezoelectric translation devices. Rev. Sci. Instrum. 58, 54 (1987). https://doi.org/10.1063/1.1139566
Patent DE 40 23311 C2
A. J. Fleming, A review of nanometer resolution position sensors: operation and performance. Sens. Actuators A: Phys. 190, 106 (2013). https://doi.org/10.1016/j.sna.2012.10.016
Patent WO 93/19494
V. Cherepanov, P. Coenen, B. Voigtländer, A nanopositioner for scanning probe microscopy: the KoalaDrive. Rev. Sci. Instrum. 83, 023703 (2012). https://doi.org/10.1063/1.3681444
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
Copyright information
© 2019 Springer Nature Switzerland AG
About this chapter
Cite this chapter
Voigtländer, B. (2019). Atomic Force Microscopy Designs. In: Atomic Force Microscopy. NanoScience and Technology. Springer, Cham. https://doi.org/10.1007/978-3-030-13654-3_4
Download citation
DOI: https://doi.org/10.1007/978-3-030-13654-3_4
Published:
Publisher Name: Springer, Cham
Print ISBN: 978-3-030-13653-6
Online ISBN: 978-3-030-13654-3
eBook Packages: Chemistry and Materials ScienceChemistry and Material Science (R0)