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Comparison of Solar-Selective Absorbance Properties of TiN, TiNxOy, and TiO2 Thin Films

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Energy Technology 2019

Part of the book series: The Minerals, Metals & Materials Series ((MMMS))

Abstract

TiN , TiNxOy , and TiO2 thin films share many properties such as electrical, and optical properties . In this work, a comparison is made between TiN , TiNxOy , and TiO2 thin films deposited by RF magnetron sputtering (reactive sputtering) using the same pure titanium target, Argon (Ar) flow rate, nitrogen flow rates, and deposition time. In the case of TiNxOy thin film, oxygen is pumped in addition. TiO2 is obtained by annealing the sputtered TiN thin films, which were subsequently annealed at 800 °C for 2 h in air after sputtering. The optical properties of the thin films were characterized by a spectrophotometer, and Fourier-transform infrared spectroscopy (FTIR). The morphology and structure were studied by scanning electron microscope (SEM ), atomic force microscope (AFM), and X-ray diffraction (XRD). The results show that TiN and TiNxOy thin films have metal-like behaviour with some similarities in structure and microstructure and differences in optical absorbance. After annealing the TiN layer, the optical absorbance of the TiO2 is equal to 94% with a stable profile at ultraviolet, visible, and near infrared ranges.

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Acknowledgements

The authors thank the Center of Excellence, Nano Technology center in Egypt, and the Science & Technology Development Fund (STDF) of Egypt Project No. 10663.

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Authors and Affiliations

  1. Metallurgical Engineering Department, Faculty of Engineering, Cairo University, Giza, 12613, Egypt

    Hanan Abd El-Fattah, Iman El Mahallawi & Waleed Khalifa

  2. Mechanical Engineering Department, Faculty of Engineering, The British University in Egypt, Al-Shorouk City, Cairo, 11873, Egypt

    Mostafa Shazly

Authors
  1. Hanan Abd El-Fattah
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  2. Iman El Mahallawi
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  3. Mostafa Shazly
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  4. Waleed Khalifa
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Corresponding author

Correspondence to Iman El Mahallawi .

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Editors and Affiliations

  1. Nucor Castrip Arkansas, Blytheville, AR, USA

    Tao Wang

  2. Royal Melbourne Institute of Technology, Melbourne, VIC, Australia

    Xiaobo Chen

  3. Idaho National Laboratory, Idaho Falls, ID, USA

    Donna Post Guillen

  4. University of Alaska Fairbanks, Fairbanks, AK, USA

    Lei Zhang

  5. Queensland University of Technology, Brisbane, QLD, Australia

    Ziqi Sun

  6. Northeastern University, Shenyamg, China

    Cong Wang

  7. Commonwealth Scientific and Industrial Research Organization, Clayton South, VIC, Australia

    Nawshad Haque

  8. Purdue University, West Lafayette, IN, USA

    John A. Howarter

  9. IND LLC, South Jordan, UT, USA

    Neale R Neelameggham

  10. Al-Isra University, Amman, Jordan

    Shadia Ikhmayies

  11. University of Utah, Salt Lake City, UT, USA

    York R. Smith

  12. University of British Columbia, Vancouver, BC, Canada

    Leili Tafaghodi

  13. LG Fuel Cell Systems, North Canton, OH, USA

    Amit Pandey

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El-Fattah, H.A., Mahallawi, I.E., Shazly, M., Khalifa, W. (2019). Comparison of Solar-Selective Absorbance Properties of TiN, TiNxOy, and TiO2 Thin Films. In: Wang, T., et al. Energy Technology 2019. The Minerals, Metals & Materials Series. Springer, Cham. https://doi.org/10.1007/978-3-030-06209-5_26

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