Abstract
A new development of a charge sensor based on MEMS vibrating-reed has been proposed in this work. The proposed charge sensing device has been fabricated on silicon-on-glass (SOG) technology than its silicon-on-insulator (SOI) counterpart. For the read-out circuit, a non-inverting voltage-mode amplifier with high pass filter has been designed by an operational amplifier IC. The MEMS charge sensor prototype achieved an experimental sensitivity of 5.5 × 109 V/C (in air) with good linearity and improved resolution.
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References
Jaramillo, G., Horsley, D.A., Buffa, C., Langfelder, G.: A MEMS based electrometer with a low-noise switched reset amplifier for charge measurement. In: Proceedings of the 11th IEEE Sensors Conference, pp. 1–4 (2012)
Low Level Measurements Handbook 2004 Keithley (Cleveland 6th edition)
Jalil, J., Zhu, Y., Ekanayake, C., Ruan, Y.: Sensing of single electrons using micro and nano technologies: a review. Nanotechnology 28(14), 142002 (2017)
Likharev, K.K.: Single electron devices and their applications. Proc. IEEE 87, 606–632 (1999)
Cleland, A.N., Roukes, M.L.: A nanometer-scale mechanical electrometer. Nature 392, 160–162 (1998)
Chen, D., Zhao, J., Wang, Y., Xie, J.: An electrostatic charge sensor based on micro resonator with sensing scheme of effective stiffness perturbation. J. Micromech. Microeng. 27(6), 065002 (2017)
Zhu, Y., Lee, J., Seshia, A.: System-level simulation of a micromachined electrometer using a time-domain variable capacitor circuit model. J. Micromech. Microeng. 17(5), 1059–1065 (2007)
Zhu, Y., Lee, J.E.Y., Seshia, A.A.: A resonant micromachined electrostatic sensor. IEEE Sensors J. 8(9), 1499–1505 (2008)
Lee, J., Zhu, Y., Seshia, A.: Room temperature electrometry with SUB-10 electron charge resolution. J. Micromech. Microeng. 18(2), 025033 (2008)
Lee, J.E.Y., Zhu, Y., Seshia, A.A.: A micromechanical electrometer approaching single-electron charge resolution at room temperature. In: Proceedings of the IEEE 21st International Conference on MEMS, pp. 948–951 (2008)
Zhu, Y., Lee, J., Seshia, A.: Sub-10e charge resolution for room temperature electrometry. In: IEEE Sensors Conference, pp. 821–824 (2007)
Zhu, Y., Lee, J., and Seshia, A.: MEMS electrometer system simulation using a time-domain variable capacitor model. In: Proceedings of the 14th IEEE Transducers, pp. 1685–1688 (2007)
Riehl, P.S., Scott, K.L., Muller, R.S., Howe, R.T., Yasaitis, J.A.: Electrostatic charge and field sensors based on micromechanical resonators. J. Microelectromech. Syst. 12(5), 577–589 (2003)
http://www.memscap.com/products/mumps/soimumps/reference-material. Accessed 15 Jan 2018
Chen, D., Zhao, J., Wang, Y., Xu, Z., Xie, J.: Sensitivity manipulation on micro-machined resonant electrometer toward high resolution and large dynamic range. Appl. Phys. Lett. 112(1), 013502 (2018)
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Jalil, J., Zhu, Y., Dinh, T., Ruan, Y. (2019). Development of a Vibrating-Reed MEMS Charge Sensor on Silicon-on-Glass Technology. In: Dao, D., Howlett, R., Setchi, R., Vlacic, L. (eds) Sustainable Design and Manufacturing 2018. KES-SDM 2018. Smart Innovation, Systems and Technologies, vol 130. Springer, Cham. https://doi.org/10.1007/978-3-030-04290-5_13
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DOI: https://doi.org/10.1007/978-3-030-04290-5_13
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