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Development of a Vibrating-Reed MEMS Charge Sensor on Silicon-on-Glass Technology

  • Jubayer JalilEmail author
  • Yong Zhu
  • Toan Dinh
  • Yong Ruan
Conference paper
Part of the Smart Innovation, Systems and Technologies book series (SIST, volume 130)

Abstract

A new development of a charge sensor based on MEMS vibrating-reed has been proposed in this work. The proposed charge sensing device has been fabricated on silicon-on-glass (SOG) technology than its silicon-on-insulator (SOI) counterpart. For the read-out circuit, a non-inverting voltage-mode amplifier with high pass filter has been designed by an operational amplifier IC. The MEMS charge sensor prototype achieved an experimental sensitivity of 5.5 × 109 V/C (in air) with good linearity and improved resolution.

Keywords

Charge sensor Silicon-on-glass MEMS Vibrating-reed 

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Copyright information

© Springer Nature Switzerland AG 2019

Authors and Affiliations

  1. 1.Griffith UniversityGold CoastAustralia
  2. 2.Tsinghua UniversityBeijingPeople’s Republic of China

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