Abstract
The semiconductor industry is nowadays under constant pressure to produce devices which are cheaper, smaller, more powerful, and efficient. Moreover, current advances in the production of thin layers have made a whole new range of devices manufacturable. Thin films on substrates are generally prepared using bulk growth methods or physical vapor deposition (PVD) and chemical vapor deposition (CVD) . Growth and processing techniques of materials including semiconductors are reviewed in this chapter.
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Cortese, B. et al. (2019). Processing Techniques. In: Pech-Canul, M., Ravindra, N. (eds) Semiconductors. Springer, Cham. https://doi.org/10.1007/978-3-030-02171-9_2
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