Abstract
Large area three-dimensional (3D) micro-structured surfaces can be found in holograms, diffractive optical elements (DOEs) and anti-reflective films, etc. [1]. A large number of the surfaces are composed of periodical micro-structures with a small structure width (in the X- and Y-directions) from several microns to several tens microns. Most of the surfaces are required to be fabricated accurately over an area lager than several millimeters.
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(2010). Large Area Scanning Probe Microscope for Micro-textured Surfaces. In: Precision Nanometrology. Springer Series in Advanced Manufacturing, vol 0. Springer, London. https://doi.org/10.1007/978-1-84996-254-4_8
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DOI: https://doi.org/10.1007/978-1-84996-254-4_8
Publisher Name: Springer, London
Print ISBN: 978-1-84996-253-7
Online ISBN: 978-1-84996-254-4
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