Abstract
The straightness is another fundamental geometric parameter of precision workpieces. The straightness of a workpiece surface can be measured by scanning a displacement sensor or a slope sensor over the workpiece surface by a linear stage (slide). Because the axis of motion of the linear stage functions as the reference for the measurement, any out-of-straightness error motion of the slide will cause a measurement error. Because the out-of-straightness error of a precision linear slide (slide error) is typical on the order of 100 nm over a 100 mm moving stroke [1], it is necessary to separate the error motion for precision nanometrology of the workpiece straightness. The influence of the straightness error of a straightedge surface, which is employed as the reference for measurement of slide error, should also be removed.
Similar to the roundness measurement described in Chapter 5, error separation can be carried out by the multi-sensor method and the reversal method. This chapter provides solutions to some key issues inherent in conventional error separation methods for measurement of workpiece straightness and slide error.
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(2010). Scanning Error Separation System for Measurement of Straightness. In: Precision Nanometrology. Springer Series in Advanced Manufacturing, vol 0. Springer, London. https://doi.org/10.1007/978-1-84996-254-4_6
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DOI: https://doi.org/10.1007/978-1-84996-254-4_6
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