Abstract
A surface acoustic wave (SAW) linear motor, which is a kind of ultrasonic motors, has many merits such as thin structure, large force, high speed, precise positioning and so on. Wear, however, is one of critical problems in the motor due to friction drive principle. On the other hand, diamond-like carbon (DLC) films have been recognized as a wear resistant material. In this chapter, application of Diamond-like-carbon (DLC) film as a wear-resistant film for its friction drive is introduced. In the application, projections on the conventional silicon slider can be replaced with segment-structured DLC (S-DLC) films. The installation of the films to slider/stator surface is reported. Improvement of preparation method of the films is proposed. Measurement results of driving characteristics of the motors with the films are also described.
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Takasaki, M. (2010). Segment-Structured Diamond-Like Carbon Films Application to Friction Drive of Surface Acoustic Wave Linear Motor. In: Higuchi, T., Suzumori, K., Tadokoro, S. (eds) Next-Generation Actuators Leading Breakthroughs. Springer, London. https://doi.org/10.1007/978-1-84882-991-6_25
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DOI: https://doi.org/10.1007/978-1-84882-991-6_25
Publisher Name: Springer, London
Print ISBN: 978-1-84882-990-9
Online ISBN: 978-1-84882-991-6
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