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Chemical Vapour Deposition pp 73–128Cite as

Chemical Vapour Deposition Systems Design

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Part of the book series: Engineering Materials and Processes ((EMP))

Abstract

This chapter introduces new equipment design and a CVD process methodology. The chapter then gives details of the most commonly used subsystems followed by some special applications of CVD processes.

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(2010). Chemical Vapour Deposition Systems Design. In: Chemical Vapour Deposition. Engineering Materials and Processes. Springer, London. https://doi.org/10.1007/978-1-84882-894-0_3

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