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Surface Integrity in Machining pp 181–211Cite as

Surface Integrity of Micro- and Nanomachined Surfaces

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Abstract

Micro- and nanomachining processes are being developed that minimize the damage created due to the removal of materials at low and high material removal rates. In order to characterize the level of damage induced, the integrity of the workpiece surface requires to be measured. This chapter provides a state-of-the-art review of micro- and nanomachining and the measurement of surface integrity of micro- and nanomachined surfaces.

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Authors and Affiliations

  1. Center for Advanced Manufacturing, Purdue University, 401 North Grant Street, 47907, West Lafayette, IN, USA

    M. J. Jackson

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  1. M. J. Jackson
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Editors and Affiliations

  1. Department of Mechanical Engineering, University of Aveiro, Campus Universitário de Santiago, 3810-193, Aveiro, Portugal

    J. Paulo Davim

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Jackson, M. (2010). Surface Integrity of Micro- and Nanomachined Surfaces. In: Davim, J. (eds) Surface Integrity in Machining. Springer, London. https://doi.org/10.1007/978-1-84882-874-2_6

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  • DOI: https://doi.org/10.1007/978-1-84882-874-2_6

  • Publisher Name: Springer, London

  • Print ISBN: 978-1-84882-873-5

  • Online ISBN: 978-1-84882-874-2

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