Abstract
Piezoelectric actuators have received increasing attention in recent years along with the emergence of new technologies, such as nanotechnology and biotechnology, which require precision control in an unprecedented demand. Owing to many inherent merits of these actuators, such as high resolution of displacement, high stiffness, and fast response, piezoelectric actuators have been broadly used in many applications requiring fine precision control. The application of piezoelectric actuators is further fueled by the trend of miniaturization in applied research and in the industry nowadays.
The field of piezoelectric actuators is now an interesting subject of research worth spending millions of dollars annually. Because of the superior characteristics of piezoelectric actuators in terms of precision, the term piezoelectric actuator has been closely associated with high-precision actuators.
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References
Braembussche PV, Swevers J, Brussel HV, Vanherck V (1996) Accurate tracking control of linear synchronous motor machine tool axes. Mechatronics 6(5):507–521
Budinger M, Rouchon JF, Nogarede B (2004) Analytical modeling for the design of piezoelectric rotating-mode motor. IEEE/ASME Trans Mechatron 9(1):1–9
Chen XB, Kai J (2004) Modeling of positive-displacement fluid dispensing processes. IEEE Trans Electron Packag Manuf 27(3):157–163
Fleming AJ, Moheimani SOR (2003) Precision current and charge amplifiers for driving highly capacitive piezoelectric loads. Electron Lett 39(3):282–284
Fleming AJ, Moheimani SOR (2005) A grounded load charge amplifier for reducing hysteresis in piezoelectric tube scanners. Rev Sci Instrum 76(7)
Ge P, Jouaneh M (1996) Tracking control of a piezoceramic actuator. IEEE Trans Control Syst Technol 4:209–216
Hayes DJ, Wallace DB, Cox WR (1999) MicroJet printing of solder and polymers for multi-chip modules and chip-scale packages. In: IMAPS intern conf high density packaging MCMs, pp 1–6
Huang S, Lee TH, Tan KK (2002) Robust adaptive numerical compensation for friction and force ripple in permanent magnet linear motors. IEEE Trans Magn 38(1):221–228
Hwang CL, Jan C (2003) A reinforcement discrete neuro-adaptive control for unknown piezoelectric actuator systems with dominant hysteresis. IEEE Trans Neural Netw 14(1):66–78
IEEE Standard Board (1987) IEEE standard on piezoelectricity
Newcomb CV, Flinn I (1982) Improving the linearity of piezoelectric ceramic actuators. Electron Lett 18(11):442–444
Pernette E, Henein S, Magnani I, Clavel R (1997) Design of parallel robots in microrobotics. Robotica 15:417–420
Saggere L, Kota S, Crary SB (1994) A new design for suspension of linear microactuators. Proc Dyn Syst Control 55(2):671–675
Smith S (2000) Flexures, elements of elastic mechanisms. Taylor & Francis, London
Szczech JB, Megaridis CM, Gamota DR, Zhang J (2002) Fine-line conductor manufacturing using drop-on-demand PZT printing technology. IEEE Trans Electron Packag Manuf 25(1):26–33
Trease BP, Moon Y-M, Kota S (2005) Design of large-displacement compliant joints. Trans ASME 127:788–798
Yao B, Xu L (2000) Adaptive robust precision motion control of linear motors with ripple force compensations: Theory and experiments. In: Proc 2000 IEEE inter conf contr app, Anchorage, Alaska, USA
Yao B, Xu L (2002) Adaptive robust motion control of linear motors for precision manufacturing. Mechatronics 12:595–616
Yoon KJ, Park KH, Lee SK, Goo NS, Park HC (2004) Analytical design model for a piezo-composite unimorph actuator and its verification using lightweight piezo-composite curved actuators. Smart Mater Struct 13(3):459–467
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© 2011 Springer-Verlag London Limited
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Tan, K.K., Putra, A.S. (2011). Piezoelectric Drives. In: Drives and Control for Industrial Automation. Advances in Industrial Control. Springer, London. https://doi.org/10.1007/978-1-84882-425-6_4
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DOI: https://doi.org/10.1007/978-1-84882-425-6_4
Publisher Name: Springer, London
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