Abstract
Thermodynamic equilibrium condensed phases for chemical vapor deposition (CVD) of zirconium carbide (ZrC) from C3H6-ZrCl4-H2 and CH4-ZrCl4-H2 were calculated by a method based on the minimization of the free energy of the reaction system. The deposition phase diagrams, which indicated the condensed phases, were then constructed from the calculation results. These diagrams demonstrated the effect of partial pressure of reactants, deposition temperatures, and the different carbon sources on the final condensed phases. Useful information can be provided from these diagrams to determine the process parameters for the deposition of ZrC coatings.
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Liu, J., Xu, Y., Cheng, L., Zhang, L., Wang, Y. (2008). Chemical Vapour Deposition Phase Diagrams for Zirconium Carbide. In: Yan, XT., Jiang, C., Eynard, B. (eds) Advanced Design and Manufacture to Gain a Competitive Edge. Springer, London. https://doi.org/10.1007/978-1-84800-241-8_22
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DOI: https://doi.org/10.1007/978-1-84800-241-8_22
Publisher Name: Springer, London
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