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Nanostructuring and Nanobonding by EBiD

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Automated Nanohandling by Microrobots

Part of the book series: Springer Series in Advanced Manufacturing ((SSAM))

Abstract

Since 1974, when Taniguchi coined the expression nanotechnology [1] as a description of manufacturing processes, a lot of different techniques for manufacturing on this small scale have been developed. Until that time, manufacturing processes on the micrometer scale used to be the limit. Conventional semiconductor-processing technologies are mostly limited by the achievable resolution in lithography. However, this resolution depends on the wavelength of light — or, in general, on electromagnetic waves. In order to process materials on the nanometer scale, it is either necessary to develop a new approach in materials structuring (often referred to as the bottom-up approach) or to extend the possibilities of common techniques, for example by using electromagnetic waves with considerably shorter wavelengths.

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Authors and Affiliations

  1. Division of Microrobotics and Control Engineering, Department of Computing Science, University of Oldenburg, Germany

    Thomas Wich

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  1. Thomas Wich
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Editors and Affiliations

  1. Department of Computing Science, University of Oldenburg, 26111, Oldenburg, Germany

    Sergej Fatikow (Professor, Dr.-Ing. habil.) (Professor, Dr.-Ing. habil.)

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Wich, T. (2008). Nanostructuring and Nanobonding by EBiD. In: Fatikow, S. (eds) Automated Nanohandling by Microrobots. Springer Series in Advanced Manufacturing. Springer, London. https://doi.org/10.1007/978-1-84628-978-1_10

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  • DOI: https://doi.org/10.1007/978-1-84628-978-1_10

  • Publisher Name: Springer, London

  • Print ISBN: 978-1-84628-977-4

  • Online ISBN: 978-1-84628-978-1

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