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Atomic Resolution Electron Imaging

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Advanced Transmission Electron Microscopy

Abstract

This chapter introduces the principles of high-resolution electron microscopy (HREM) and scanning transmission electron microscopy (STEM). These are the two major techniques for atomic resolution imaging of nanostructures, certain types of crystal defects and interfaces, as well as metrology in electronic and magnetic devices when atomic resolution is needed. In STEM, atomic resolution imaging using an annular dark-field detector can be combined with analytical techniques, such as energy-loss spectroscopy (EELS, which gives similar information to soft X-ray absorption spectroscopy), energy dispersive X-ray spectroscopy (EDS), and nanodiffraction, for composition and crystallographic analysis.

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Authors and Affiliations

  1. Frederick-Seitz Materials Research Laboratory, Department of Materials Science and Engineering, University of Illinois, Urbana-Champaign, Urbana, Illinois, USA

    Jian Min Zuo

  2. Department of Physics, Arizona State University, Tempe, Arizona, USA

    John C. H. Spence

Authors
  1. Jian Min Zuo
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  2. John C. H. Spence
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Correspondence to Jian Min Zuo or John C. H. Spence .

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Zuo, J.M., Spence, J.C.H. (2017). Atomic Resolution Electron Imaging. In: Advanced Transmission Electron Microscopy. Springer, New York, NY. https://doi.org/10.1007/978-1-4939-6607-3_14

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