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The Local Electrode Atom Probe

  • Michael K. Miller
  • Richard G. Forbes
Chapter
  • 2.2k Downloads

Abstract

Detailed descriptions of the components of the local electrode atom probe (LEAP) and of its general methods of operation are presented in this chapter. The LEAP is a three-chamber ultrahigh vacuum instrument consisting of a fast-entry airlock, a buffer chamber for temporary storage of specimens and local electrodes, and a spectrometry chamber. The spectrometry chamber accommodates the time-of-flight mass spectrometer, i.e., the specimen, a local electrode, an optional energy-compensating reflectron to improve the mass-resolving power, and a position-sensitive single-ion detector based on crossed delay lines. The flight times are determined by a time-to-digital converter. Timing starts from the field evaporation pulse and stops when ions strike the single-ion detector. The specimen is mounted on a nano-positioning stage, which is used to align the specimen with the aperture in the local electrode.

Keywords

Atom Probe Local Electrode Phosphor Screen Field Evaporation Buffer Chamber 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 2014

Authors and Affiliations

  • Michael K. Miller
    • 1
  • Richard G. Forbes
    • 2
  1. 1.Oak Ridge National LaboratoryOak RidgeUSA
  2. 2.Department of Electronic EngineeringUniversity of SurreyGuildfordUK

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