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Introduction to Atom-Probe Tomography

  • Michael K. Miller
  • Richard G. Forbes
Chapter

Abstract

This book describes both current atom-probe tomography (APT) practice and knowledge of related emission science. The atomic-level materials characterization technique of APT is currently the only technique able to detect individual atoms of all elements in a three-dimensional structure. Over the last decade, many major developments have raised APT to its present status as a routine characterization technique. This introductory chapter briefly describes the previous generations of atom probes and the technical developments that led to the modern state-of-the-art local electrode atom probe (LEAP®). The important ion emission process of field evaporation and the basics of field ion microscopy (FIM) are introduced. Some examples of APT characterization are also presented.

Keywords

Atom Probe Field Evaporation Field Desorption Field Electron Microscopy Local Electrode Atom Probe 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 2014

Authors and Affiliations

  • Michael K. Miller
    • 1
  • Richard G. Forbes
    • 2
  1. 1.Oak Ridge National LaboratoryOak RidgeUSA
  2. 2.Department of Electronic EngineeringUniversity of SurreyGuildfordUK

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