Integrated Circuit Fabrication Processes
□ To understand which aspects of integrated circuit fabrication have an impact on design.
□ To understand the basic processes of doping, oxide masking, photolithography, and metallization used in all silicon device fabrication, and the additions required for many IC fabrication processes.
□ To learn how the individual fabrication stages are used to build up a complete CMOS circuit.
□ To appreciate the requirements for photolithographic masks for ICs.
□ To learn about yield, the cost of producing chips, and the effects of chip area on the cost.
KeywordsChip Area Doping Profile Contact Window Entire Wafer Contact Hole
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