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Cross Section Transmission Electron Microscopy (XTEM) on Inert Gas Implanted Metals

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Fundamental Aspects of Inert Gases in Solids

Part of the book series: NATO ASI Series ((NSSB,volume 279))

Abstract

TEM specimen foils prepared perpendicular to the implanted surface allow a direct observation of the entire region modified by the injected ions. In this way depth resolved microstructural information can be obtained. The preparation technique developed for this purpose is extensively described here and applications are shown for copper and stainless steel implanted with various inert gases.

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Author information

Authors and Affiliations

  1. Philips Research Laboratories, P.O. Box 80000, 5600 JA, Eindhoven, The Netherlands

    E. Gerritsen

  2. Department of Applied Physics, University of Groningen, Nijenborgh 18, The Netherlands

    J. Th. M. De Hosson

Authors
  1. E. Gerritsen
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  2. J. Th. M. De Hosson
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Editor information

Editors and Affiliations

  1. The University of Salford, Salford, UK

    S. E. Donnelly

  2. AEA Technology, Harwell, UK

    J. H. Evans

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© 1991 Springer Science+Business Media New York

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Gerritsen, E., De Hosson, J.T.M. (1991). Cross Section Transmission Electron Microscopy (XTEM) on Inert Gas Implanted Metals. In: Donnelly, S.E., Evans, J.H. (eds) Fundamental Aspects of Inert Gases in Solids. NATO ASI Series, vol 279. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-3680-6_12

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  • DOI: https://doi.org/10.1007/978-1-4899-3680-6_12

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4899-3682-0

  • Online ISBN: 978-1-4899-3680-6

  • eBook Packages: Springer Book Archive

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