Abstract
Aerosol contamination monitoring in the semiconductor industry is accepted as the key measure to improve microprocessor performance and reduce the number of failing microcircuits due to particulate contamination. This paper addresses the most important performance parameters and specifications of optical aerosol contamination particle counters (OACPC) and makes an effort to uncover their relationships. The need for definitions of these quantities will be documented. It is the intention of the paper to start the discussion of these quantities and to illustrate some of the obvious interconnections.
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© 1990 Springer Science+Business Media New York
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Sommer, H.T. (1990). Resolution, Sensitivity, Counting Efficiency, and Coincidence Limit of Optical Aerosol Particle Counters. In: Mittal, K.L. (eds) Particles in Gases and Liquids 2. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-3544-1_24
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DOI: https://doi.org/10.1007/978-1-4899-3544-1_24
Publisher Name: Springer, Boston, MA
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