Abstract
The influence of mechanical shocks on a gas cylinder, one of the critical components in a gas distribution system, was evaluated with respect to particle generation. An experimental technique was developed for applying impact shocks and for simultaneous measurements of the shock intensity, the corresponding particle concentration and size distribution. It was found that a significant amount of submicron particles could be generated by impact shocks on the order of 103 g. The particle size distribution based on number concentration indicated a peak around 0.1 μm. It is further shown that data reported here might correspond to ppb-ppm resuspension. It implies that allowable shock intensity for today’s high-purity gas distribution systems should be defined based on an extremely low level of resuspension, whereas classical adhesion theory and experiments are based on 50% removal.
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References
M. W. Reeks, J. Reed, and D. Hall, J. Phys. D: Appl. Phys., 21, 574 (1988).
H. Y. Wen and G. Kasper, J. Aerosol Sci., 20, 483 (1989).
G. Kasper, H. Y. Wen, and H. C. Wang, in “SEMICON/EAST89 Technical Proceedings”, 80 (1989).
H. C. Hamaker, Physica4, 1058 (1937).
K. L. Johnson, K. Kendall, and A. D. Roberts, Proc. Roy. Soc. Ser. A, 324, 301 (1971).
B. V. Derjaguin, V. M. Muller, and Y. P. Toporov, J. Colloid Interface Sci., 53, 314 (1975).
K. L. Mittal, editor, “Particles on Surfaces 1: Detection, Adhesion, and Removal”, Plenum Press, New York (1988).
K. L. Mittal, editor, “Particles on Surfaces 2: Detection, Adhesion, and Removal”, Plenum Press, New York (1989).
M. B. Ranade, Aerosol Sci. Technol., Z, 161 (1987).
M. C. Kordecki, J. M. Gladden, and C. Orr, Report No. B-148, Engineering Experiment Station, Georgia Inst. of Technol., Atlanta, Georgia (1959).
A. D. Zimon, “Adhesion of Dust and Powder”, Plenum Press, New York (1969).
NRC Reports, “Airborne Particles”, University Park Press, Baltimore, pp 11-54 (1979).
H. C. Wang, H. Y. Wen, and G. Kasper, in “Proceedings of Inst. of Environ. Sci. 35th Annual Technical Meeting”, 406 (1989).
G. Kasper and H. Y. Wen, Particles in ultrapure process gases, in “Handbook of Contamination Control in Microelectronics”, D. Tolliver, editor, Noyes Publications, Park Ridge, NJ (1988).
H. C. Wang, H. Y. Wen, and G. Kasper, Solid State Technol., 155 (May, 1988).
H. C. Wang and G. Kasper, Note on inertial deposition of particles on an orifice disc, J. Aerosol Sci., in press (1990).
H. C. Wang, Theoretical comparison of mechanisms to overcome particle-surface adhesion, presented in the European Aerosol Conf., Vienna (1989).
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© 1990 Springer Science+Business Media New York
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Wang, HC., Wen, HY., Kasper, G. (1990). Particle Release from Surfaces by Mechanical Shocks. In: Mittal, K.L. (eds) Particles in Gases and Liquids 2. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-3544-1_12
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DOI: https://doi.org/10.1007/978-1-4899-3544-1_12
Publisher Name: Springer, Boston, MA
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