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Particle Release from Surfaces by Mechanical Shocks

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Particles in Gases and Liquids 2

Abstract

The influence of mechanical shocks on a gas cylinder, one of the critical components in a gas distribution system, was evaluated with respect to particle generation. An experimental technique was developed for applying impact shocks and for simultaneous measurements of the shock intensity, the corresponding particle concentration and size distribution. It was found that a significant amount of submicron particles could be generated by impact shocks on the order of 103 g. The particle size distribution based on number concentration indicated a peak around 0.1 μm. It is further shown that data reported here might correspond to ppb-ppm resuspension. It implies that allowable shock intensity for today’s high-purity gas distribution systems should be defined based on an extremely low level of resuspension, whereas classical adhesion theory and experiments are based on 50% removal.

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References

  1. M. W. Reeks, J. Reed, and D. Hall, J. Phys. D: Appl. Phys., 21, 574 (1988).

    Article  Google Scholar 

  2. H. Y. Wen and G. Kasper, J. Aerosol Sci., 20, 483 (1989).

    Article  CAS  Google Scholar 

  3. G. Kasper, H. Y. Wen, and H. C. Wang, in “SEMICON/EAST89 Technical Proceedings”, 80 (1989).

    Google Scholar 

  4. H. C. Hamaker, Physica4, 1058 (1937).

    Google Scholar 

  5. K. L. Johnson, K. Kendall, and A. D. Roberts, Proc. Roy. Soc. Ser. A, 324, 301 (1971).

    Article  CAS  Google Scholar 

  6. B. V. Derjaguin, V. M. Muller, and Y. P. Toporov, J. Colloid Interface Sci., 53, 314 (1975).

    Article  CAS  Google Scholar 

  7. K. L. Mittal, editor, “Particles on Surfaces 1: Detection, Adhesion, and Removal”, Plenum Press, New York (1988).

    Google Scholar 

  8. K. L. Mittal, editor, “Particles on Surfaces 2: Detection, Adhesion, and Removal”, Plenum Press, New York (1989).

    Google Scholar 

  9. M. B. Ranade, Aerosol Sci. Technol., Z, 161 (1987).

    Google Scholar 

  10. M. C. Kordecki, J. M. Gladden, and C. Orr, Report No. B-148, Engineering Experiment Station, Georgia Inst. of Technol., Atlanta, Georgia (1959).

    Google Scholar 

  11. A. D. Zimon, “Adhesion of Dust and Powder”, Plenum Press, New York (1969).

    Google Scholar 

  12. NRC Reports, “Airborne Particles”, University Park Press, Baltimore, pp 11-54 (1979).

    Google Scholar 

  13. H. C. Wang, H. Y. Wen, and G. Kasper, in “Proceedings of Inst. of Environ. Sci. 35th Annual Technical Meeting”, 406 (1989).

    Google Scholar 

  14. G. Kasper and H. Y. Wen, Particles in ultrapure process gases, in “Handbook of Contamination Control in Microelectronics”, D. Tolliver, editor, Noyes Publications, Park Ridge, NJ (1988).

    Google Scholar 

  15. H. C. Wang, H. Y. Wen, and G. Kasper, Solid State Technol., 155 (May, 1988).

    Google Scholar 

  16. H. C. Wang and G. Kasper, Note on inertial deposition of particles on an orifice disc, J. Aerosol Sci., in press (1990).

    Google Scholar 

  17. H. C. Wang, Theoretical comparison of mechanisms to overcome particle-surface adhesion, presented in the European Aerosol Conf., Vienna (1989).

    Google Scholar 

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© 1990 Springer Science+Business Media New York

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Wang, HC., Wen, HY., Kasper, G. (1990). Particle Release from Surfaces by Mechanical Shocks. In: Mittal, K.L. (eds) Particles in Gases and Liquids 2. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-3544-1_12

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  • DOI: https://doi.org/10.1007/978-1-4899-3544-1_12

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4899-3546-5

  • Online ISBN: 978-1-4899-3544-1

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