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Particles in Gases and Liquids 2 pp 3–21Cite as

Modeling of Particle Deposition in Cleanroom Environments: Current Status

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Abstract

Recently many models have been presented to describe particle deposition in cleanroom environments. The models can be classified according to the scale of flow — cleanroom scale, equipment scale, or product scale. For the latter case, a detailed flow field is numerically generated or an idealized flow field is assumed. Particle deposition rates, in the presence of various external forces, are subsequently calculated by solving either the equation of convective diffusion or the particle equation of motion. A wide range of deposition mechanisms can be included: to account for actual operating conditions; and to assess the effectiveness of anti-contamination schemes.

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Author information

Authors and Affiliations

  1. Chemical Engineering Department, Washington University, St. Louis, MO, 63130, USA

    Jay R. Turner

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  1. Jay R. Turner
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Editor information

Editors and Affiliations

  1. IBM U.S. Technical Education, 500 Columbus Ave., Thornwood, NY, 10594, USA

    K. L. Mittal

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© 1990 Springer Science+Business Media New York

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Turner, J.R. (1990). Modeling of Particle Deposition in Cleanroom Environments: Current Status. In: Mittal, K.L. (eds) Particles in Gases and Liquids 2. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-3544-1_1

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  • DOI: https://doi.org/10.1007/978-1-4899-3544-1_1

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4899-3546-5

  • Online ISBN: 978-1-4899-3544-1

  • eBook Packages: Springer Book Archive

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