Abstract
Most early Monte Carlo programs which intended simulation of electron trajectories with depth distribution profiles put emphasis on the elastic scattering responsible for large angle deflection. The problem is the following: find an effective d(ps) elementary path associated with every d(pz) layer imbedded in the target. There is only one statistical variable besides those of the traditional ZAF data reduction procedure: the scattering angle.
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Henoc, J., Maurice, F. (1991). A Flexible and Complete Monte Carlo Procedure for the Study of the Choice of Parameters. In: Heinrich, K.F.J., Newbury, D.E. (eds) Electron Probe Quantitation. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-2617-3_7
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