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Quantitative X-Ray Microanalysis in the Analytical Electron Microscope

  • Chapter
Book cover Electron Probe Quantitation

Abstract

The analytical electron microscope (AEM) is related to the transmission electron microscope (TEM) in a manner closely analogous to the relationship between the electron probe microanalyzer (EPMA) and the scanning electron microscope (SEM). While the term “analytical electron microscopy” is ill-defined, it is generally taken to mean quantitative elemental and structural analysis of thin (electron-transparent) specimens. This analysis is invariably performed in a probe-forming, scanning TEM, or STEM, at an accelerating voltage in the range 100–400 kV, substantially higher than in an SEM/EPMA. In this paper we will emphasize only the aspect of the AEM concerned with quantitative analysis of x rays using an energy-dispersive spectrometer (EDS) interfaced to a STEM. However, it is important to recognize that there are many other signals generated when an electron beam traverses a thin sample, as shown in figure 1. In particular, the electron energy-loss signal and the convergent-beam electron diffraction pattern are important analytical tools, which in many ways complement the x-ray spectral information. In addition, of course, the AEM is also capable of generating the many forms of images traditionally associated with a conventional TEM (and SEM). In fact, it is arguable that the development of the AEM has prevented the TEM from declining in importance as a tool for materials characterization.

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Author information

Authors and Affiliations

  1. Department of Materials Science and Engineering, Lehigh University, Bethlehem, PA, 18015, USA

    D. B. Williams & J. I. Goldstein

Authors
  1. D. B. Williams
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  2. J. I. Goldstein
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Editor information

Editors and Affiliations

  1. Chemical Science and Technology Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland, USA

    K. F. J. Heinrich  & Dale E. Newbury  & 

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Williams, D.B., Goldstein, J.I. (1991). Quantitative X-Ray Microanalysis in the Analytical Electron Microscope. In: Heinrich, K.F.J., Newbury, D.E. (eds) Electron Probe Quantitation. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-2617-3_18

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  • DOI: https://doi.org/10.1007/978-1-4899-2617-3_18

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4899-2619-7

  • Online ISBN: 978-1-4899-2617-3

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