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Small Particles

Formation, Structure, and Behavior

  • Chapter
Oriented Crystallization on Amorphous Substrates

Part of the book series: Microdevices ((MDPF))

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Abstract

This book is devoted primarily to formation of thin films, especially of films with thicknesses of 0.1–1 µm, as the most important in practice. Since the thickness of the films, when formed, is in this range, the films consist of crystalline grains that obviously measure no more than 0.1–1 µm in at least one dimension. Moreover, for thermodynamic reasons (e.g., surface-energy effects), the films tend to agglomerate from small grains that measure approximately the same in all three dimensions. Kinetic effects are even more important in determining film dimensions: During formation of the films, particles of submicrometer size are involved in almost all processes beginning with nucleation.

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    E. I. Givargizov

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Givargizov, E.I. (1991). Small Particles. In: Oriented Crystallization on Amorphous Substrates. Microdevices. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-2560-2_2

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