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Mechanisms of Reactions of Organometallic Compounds with Surfaces pp 279–288Cite as

Heteroepitaxy of InSb by Metal Organic Magnetron Sputtering

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Part of the book series: NATO ASI Series ((NSSB,volume 198))

Abstract

Metalorganic magnetron sputtering (MOMS) is an emerging technology that is currently being developed for the epitaxial deposition of multi-component materials1. The various elemental or compound sources in the MOMS system are provided by a combination of high purity targets that are magnetron sputtered in an atmosphere of low pressure argon, and by metalorganic compounds introduced near the growth surface via a conventional gas manifold.

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Author information

Authors and Affiliations

  1. Laboratory for Microstructural Sciences, Division of Physics, National Research Council, 100 Sussex Drive, Ottawa, Canada, K1A 0R6

    J. B. Webb, T. Sudersena Rao & C. Halpin

  2. Advanced Devices and Reliability Directorate, Communications Research Centre, 3701 Carling Ave, Ottawa, Canada, K2H 8S2

    J. P. Noad

Authors
  1. J. B. Webb
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  2. T. Sudersena Rao
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  3. C. Halpin
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  4. J. P. Noad
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Editor information

Editors and Affiliations

  1. University of St. Andrews, St. Andrews, Fife, Scotland, UK

    D. J. Cole-Hamilton

  2. University of Manchester Institute of Science and Technology (UMIST), Manchester, UK

    J. O. Williams

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© 1989 Springer Science+Business Media New York

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Webb, J.B., Rao, T.S., Halpin, C., Noad, J.P. (1989). Heteroepitaxy of InSb by Metal Organic Magnetron Sputtering. In: Cole-Hamilton, D.J., Williams, J.O. (eds) Mechanisms of Reactions of Organometallic Compounds with Surfaces. NATO ASI Series, vol 198. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-2522-0_31

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  • DOI: https://doi.org/10.1007/978-1-4899-2522-0_31

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4899-2524-4

  • Online ISBN: 978-1-4899-2522-0

  • eBook Packages: Springer Book Archive

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