Abstract
The replacement of the elemental sources of conventional MBE with simple compounds, first reported in 1980 [1], was initiated in order to bring the advantages of molecular beam epitaxy to the growth of GaxIn1−xAs1−yPy/InP heterostructures. These advantages center about precision in layer thickness and abruptness in doping and heterojunction interfaces. This replacement of elemental sources was necessary because III–V semiconductors containing P, and particularly As and P simultaneously, are very difficult to grow by conventional MBE. A well controlled and useful beam flux from an effusion cell containing elemental phosphorus is difficult to achieve because of the presence of allotropic forms of solid P, each having a different vapor pressure, and because condensed P vaporizes to yield P4 molecules. The morphological observations of Asahi et al [2] of InP grown with P4, and the studies of the relative incorporation of As and P during MBE of GaAs1−yPy and InAsyP1−y by Foxon et al [3], suggest that P4 has a small accommodation coefficient on the III–V surface. It is possible, of course to thermally crack P4 to P2, and P2 can readily be used for epitaxy of P containing III–V compounds. Its accommodation coefficient is approximately unity [4]. However, the generation of P2 by adding a thermal cracker to a conventional effusion oven does not eliminate the underlying stability problem and has added control problems.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
M. B. Panish, J. Electrochem. Soc. 127, 2729 (1980).
H. Asahi, Y. Kawamura, M. Ikeda and H. Okamoto, J. Appl. Phys. 52, 2852 (1981).
C. T. Foxon, B. A. Joyce and M. T. Norris, J. Crystal Growth 49, 132 (1980).
M. B. Panish and S. Sumski, J. Appl. Phys. 55, 3571 (1984).
E. Veuhoff, W. Pletschen, P. Balk and H. Lüth, J. Cryst Growth 55, 30 (1981).
W. T. Tsang, A. N. Dayem, T. H. Chiu, J. E. Cunningham, E. F. Schubert, J. A. Ditzenburger, J. Shah, J. L. Zyskind and N. Tabatabaie, Appl. Phys. Lett. 49, 170 (1986).
M. B. Panish, J. Cryst. Growth 81, 249 (1987).
W. T. Tsang, J. Electron. Mat. 15, 235 (1986).
M. B. Panish and J. R. Arthur, J. Chem. Thermo. 2, 299 (1970).
J. Drowart and P. Goldfinger, J. Chem. Phys. 55, 721 (1958).
G. J. Macur, R. K. Edwards and P. G. Wahlbeck, J. Phys. Chem. 70, 2956 (1966).
R. Hultgren, R. L. Orr, P. D. Anderson and K. K. Kelley, “Selected Values of Thermodynamic Properties of Metals and Alloys”, John Wiley and Sons, N.Y. 1963.
M. B. Panish, J. Cryst. Growth 27, 6 (1974).
J. R. Arthur, J. Phys. Chem. Solids 28, 2257 (1967).
C. T. Foxon, J. A. Harvey and B. A. Joyce, J. Phys Chem. Solids 34, 1693 (1973).
M. B. Panish, Prog. Cryst. Growth and Charact. 12, 1 (1986).
W. T. Tsang, J. Cryst. Growth 81, 261 (1987).
H. Heinecke, K. Werner, M. Weyers, H. Lüth and P. Balk, J. Crystal Growth 81 270 (1987).
K. Kimura, S. Horiguchi, K. Kamon, M. Shimazu, M. Mashita, M. Mihara and M. Ishi, J. Crystal Growth 81, 276 (1987).
T. H. Chiu, W. T. Tsang, J. E. Cunningham and A. Robertson, Jr., J. Appl. Phys. 62, 2302 (1987).
J. H. Neave, B. A. Joyce, P. J. Dobson and N. Norton, Appl. Phys. A31, 1 (1983).
J. M. Van Hove, C. S. Lent, P. I. Cohen, J. Vac. Sci. Technol., B1, 741 (1983).
Y. Kawaguchi, H. Asahi and N. Nagai, Proc. 12th Int. Conf. on GaAs and Related Compounds, Karuizawa, Japan, 1985, (Inst. Phys. London, 1986) p.79, Institute of Physics Conf. Series.
N. Vodjdani, A. Lamarchand and H. Paradan, J. Physique, Colloq. C5, Vol 43, 339 (1982).
E. Tokumitsu, Y. Kudou, M. Konagai and K. Takahashi, J. Appl. Phys. 55, 3163 (1984).
W. T. Tsang, Appl. Phys. Lett., 45, 1234 (1984).
S. Horiguchi, K. Kimura, K. Kamon, M. Mashita, M. Shimazu, M. Mihara and M. Ishi, Japan. J. Appl. Phys. 25, L979 (1986).
Y. Kawaguchi, H. Asahi, and H. Nagai, Extended Abstract, 18th Conference on Solid State Devices and Materials, Tokyo (1986) p. 619.
N. Kobayashi, J. L. Benchimol, F. Alexandre and Y. Gao, Appl. Phys. Lett. 51, 1907 (1987).
C. Abernathy and M. B. Panish unpublished results.
A. Robertson, Jr., T. H. Chiu, W. T. Tsang and J. E. Cunningham, J. Appl. Phys. July 1988, In Press.
E. Tokomitsu, Y. Kudou, M. Konagai and K. Takahashi, J. Appl. Phys. 55, 3163 (1984).
N. Pütz, E. Veuhoff, H. Heinecke, M. Heyen, H. Lüth and P. Balk, J Vacuum Sci. Technol. B3, 671 (1985).
S. Takagishi and H. Mori, Japan J. Appl Phys. 22, L795 (1983).
N. Kobayashi and T. Fukui, Electron. Lett. 20, 887 (1984).
K. Kondo, H. Ishikawa, S. Sasa, Y. Suguyama and Y. Hiyamizu, Japan. J. Appl. Phys. 25, L52 (1986).
Y. Kawaguchi, H. Asahi and H. Nagai, Japan. J. Appl. Phys. 23, L737 (1986).
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1989 Springer Science+Business Media New York
About this chapter
Cite this chapter
Panish, M.B. (1989). Gas Source Molecular Beam Epitaxy. In: Cole-Hamilton, D.J., Williams, J.O. (eds) Mechanisms of Reactions of Organometallic Compounds with Surfaces. NATO ASI Series, vol 198. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-2522-0_30
Download citation
DOI: https://doi.org/10.1007/978-1-4899-2522-0_30
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4899-2524-4
Online ISBN: 978-1-4899-2522-0
eBook Packages: Springer Book Archive