Abstract
Modification of surfaces is an essential part in many areas of modern technology, and often light is used for this purpose. A whole industry is living from the supply of chemicals for the control of the light intensity and the individual surface environment for surfaces of different sensitivity in different environments. Photography and lithography are two examples, where light is used for modification and patterning of surfaces.
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© 1989 Springer Science+Business Media New York
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Stuke, M., Zhang, Y. (1989). UV Excimer Laser Induced Photochemistry of Gaseous Organometallics for Surface Modification. In: Cole-Hamilton, D.J., Williams, J.O. (eds) Mechanisms of Reactions of Organometallic Compounds with Surfaces. NATO ASI Series, vol 198. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-2522-0_3
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DOI: https://doi.org/10.1007/978-1-4899-2522-0_3
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